Dr. Seong-Min Ma Profile

Dr. Seong-Min Ma

at SK Hynix Inc

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Publications (1)

Proceedings Article | 29 March 2013 Paper

Yield enhancement of 3D flash devices through broadband brightfield inspection of the channel hole process module

Jung-Youl Lee, Il-Seok Seo, Seong-Min Ma, Hyeon-Soo Kim, Jin-Woong Kim, DoOh Kim, Andrew Cross

Proceedings Volume 8685, 86850U (2013) https://doi.org/10.1117/12.2011435

KEYWORDS: Inspection, Semiconducting wafers, Scanning electron microscopy, Optical lithography, Etching, Bridges, Particles, Defect inspection, Channel projecting optics, Thin film coatings

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