CONFERENCE PROCEEDINGS
Advanced Search
Se-Hyun Ahn
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 24 February 2009 Paper
High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis
Se Hyun Ahn, L. Jay Guo
Proceedings Volume 7205, 72050U (2009) https://doi.org/10.1117/12.809821
KEYWORDS: Nanoimprint lithography, Ultraviolet radiation, Positron emission tomography, Coating, Liquids, Nanostructures, Optical lithography, Silicon, Nanolithography, Photoresist processing
SIGN IN TO:
  • View contact details
UPDATE YOUR PROFILE
Is this your profile? Update it now.
Sign into your SPIE.org account
Don’t have a profile and want one?
Create an account on SPIE.org
Advertisement
Advertisement
Back to Top