Dr. Sankha Subhra Sarkar Profile

Dr. Sankha Subhra Sarkar

at Intel Corp

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Publications (2)

Proceedings Article | 13 March 2012 Paper

Fast source independent estimation of lithographic difficulty supporting large scale source optimization

David DeMaris, Maria Gabrani, Sankha Sarkar, Nathalie Casati, Ronald Luijten, Kafai Lai, Kehan Tian

Proceedings Volume 8326, 832614 (2012) https://doi.org/10.1117/12.916433

KEYWORDS: Optical proximity correction, Lithography, Metals, Source mask optimization, Diffraction, Image quality, Modulation transfer functions, SRAF, Resolution enhancement technologies, Spatial frequencies

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Proceedings Article | 5 April 2011 Paper

Design specific joint optimization of masks and sources on a very large scale

K. Lai, M. Gabrani, D. Demaris, N. Casati, A. Torres, S. Sarkar, P. Strenski, S. Bagheri, D. Scarpazza, A. Rosenbluth, D. Melville, A. Wächter, J. Lee, V. Austel, M. Szeto-Millstone, K. Tian, F. Barahona, T. Inoue, M. Sakamoto

Proceedings Volume 7973, 797308 (2011) https://doi.org/10.1117/12.879787

KEYWORDS: Source mask optimization, Photomasks, Lithography, Standards development, Algorithm development, Resolution enhancement technologies, Diffraction, Visualization, Photovoltaics

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