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Dr. Sang Hyun Je
at SAMSUNG Electronics Co Ltd
SPIE Involvement:
Author
Publications (1)
Proceedings Article | 28 April 2023 Presentation + Paper
Speculation on the EUV photoresist behavior at different dose and pitch
Suk-Koo Hong, Young Joo Choi, Eunseol Kim, Sang Hyun Je, Jun Soo Kim, Jaewoo Nam, Su Min Park
Proceedings Volume 12494, 124940T (2023) https://doi.org/10.1117/12.2658295
KEYWORDS: Extreme ultraviolet, Stochastic processes, Photoresist materials, Extreme ultraviolet lithography, Photons, Design and modelling, Absorbance, Photomasks, Optical lithography, Image quality
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