Sachiko Shinjo
at Mitsubishi Gas Chemical Co., Inc.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 9 April 2024 Poster + Paper
Proceedings Volume 12957, 1295723 (2024) https://doi.org/10.1117/12.3012067
KEYWORDS: Extreme ultraviolet lithography, Absorption, Extreme ultraviolet, Photons, Photoresist processing, Electrons, Iodine, Stochastic processes

Proceedings Article | 3 October 2018 Paper
Proceedings Volume 10809, 108091X (2018) https://doi.org/10.1117/12.2323096
KEYWORDS: Extreme ultraviolet, Absorption, Transmittance, Chemical elements, Iodine, Extreme ultraviolet lithography, Mass attenuation coefficient, Resist chemistry

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