We present progress in manipulating silicon nanomembranes using holographic optical tweezers. The holographic
optical tweezers technique provides a non-contact means of directly controlling the nanomembranes. Silicon
nanomembranes are macroscopic free-standing sheets of single-crystal silicon which can be as thin as 10 nm or less. The
thinness of the membranes imparts unique electronic, optical and mechanical properties. This characteristic, combined
with the ability to precisely engineer their dimensions, makes silicon nanomembranes ideal candidates for use in new
electronic and photonic devices. The nanomembranes utilized for this work have controlled thicknesses of 220 nm and
areas reaching up to 200x200 microns. Novel all optically actuated methods for directing membranes in microfluidic
flow environments, controllable membrane flexing and as well as vertical reorientation and positioning are outlined.
Conference Committee Involvement (3)
Alternative Lithographic Technologies IV
13 February 2012 | San Jose, California, United States
Alternative Lithographic Technologies III
1 March 2011 | San Jose, California, United States
Alternative Lithographic Technologies II
23 February 2010 | San Jose, California, United States
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