Dr. Rostyslav Mastylo
at Technische Univ Ilmenau
SPIE Involvement:
Author
Publications (15)

Proceedings Article | 4 October 2023 Presentation + Paper
Proceedings Volume 12672, 1267205 (2023) https://doi.org/10.1117/12.2675734
KEYWORDS: Optical surfaces, Reconstruction algorithms, Mirrors, Motion measurement, Metrology, Matrices, Simulations, Optical spheres, Measurement uncertainty

Proceedings Article | 1 April 2020 Presentation + Paper
Proceedings Volume 11352, 1135214 (2020) https://doi.org/10.1117/12.2554526
KEYWORDS: Wavefronts, Scatterometry, Metrology, Video, Diffraction, Sensors, Binary data, Fourier spectroscopy, Inverse optics, Wavefront sensors

Proceedings Article | 23 March 2020 Paper
Ingo Ortlepp, Michael Kühnel, Martin Hofmann, Laura Weidenfeller, Johannes Kirchner, Shraddha Supreeti, Rostyslav Mastylo, Mathias Holz, Thomas Michels, Roland Füßl, Ivo Rangelow, Thomas Fröhlich, Denis Dontsov, Christoph Schäffel, Eberhard Manske
Proceedings Volume 11324, 113240A (2020) https://doi.org/10.1117/12.2551044
KEYWORDS: Interferometers, Nanofabrication, Mirrors, Actuators, Near field optics, Control systems, Manufacturing, Nanotechnology, Physics, Atomic force microscopy

Proceedings Article | 21 June 2019 Presentation + Paper
Eberhard Manske, Thomas Fröhlich, Roland Füßl, Rostyslav Mastylo, Ulrike Blumröder, Paul Köchert, Oliver Birli, Ingo Ortlepp, Christof Pruß, Folker Schwesinger, Andreas Meister
Proceedings Volume 11056, 110560L (2019) https://doi.org/10.1117/12.2526076
KEYWORDS: Metrology, Interferometers, Frequency combs, Helium neon lasers, Mirrors, Precision measurement, Sensors, Laser metrology, Sensor technology, Optics manufacturing

Proceedings Article | 21 June 2019 Presentation + Paper
Proceedings Volume 11057, 110570F (2019) https://doi.org/10.1117/12.2525319
KEYWORDS: Sensors, Diffraction, Metrology, Polarization, 3D modeling, Instrument modeling

Proceedings Article | 26 March 2019 Paper
Proceedings Volume 10958, 1095819 (2019) https://doi.org/10.1117/12.2514832
KEYWORDS: Sensors, Ultraviolet radiation, Nanoimprint lithography, Silicon, Nanostructures, Lithography, Photoresist processing, Scanning electron microscopy, Fabrication, Optical sensors

Proceedings Article | 4 March 2019 Paper
Proceedings Volume 10930, 1093017 (2019) https://doi.org/10.1117/12.2508263
KEYWORDS: Sensors, Confocal microscopy, Laser scanners, Laser processing, Fiber coupled lasers

Proceedings Article | 26 June 2017 Paper
Proceedings Volume 10330, 103300N (2017) https://doi.org/10.1117/12.2270252
KEYWORDS: Geometrical optics, Scatterometry, Semiconductors, Sensors, Diffraction, Near field optics, Semiconducting wafers, Near field, Optical simulations, Laser optics

Proceedings Article | 26 June 2017 Paper
Proceedings Volume 10329, 1032916 (2017) https://doi.org/10.1117/12.2270185
KEYWORDS: 3D metrology, Interferometry, Confocal microscopy, Calibration, 3D surface sensing, Diffraction, Signal analyzers, Edge detection, Optical coherence tomography

Proceedings Article | 18 June 2007 Paper
Proceedings Volume 6616, 661621 (2007) https://doi.org/10.1117/12.732041
KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Mechatronics, Nanoprobes, Helium neon lasers, Optical testing, Spatial resolution, Atomic force microscopy

Proceedings Article | 25 October 2006 Paper
Proceedings Volume 6280, 628001 (2006) https://doi.org/10.1117/12.715237
KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Sensor technology, Nanoprobes, Microscopes, Spatial resolution, Optical testing

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 615224 (2006) https://doi.org/10.1117/12.655156
KEYWORDS: Interferometers, Mirrors, Sensors, Metrology, Atomic force microscopy, Optical testing, Sensor technology, Microscopes, Spatial resolution, Nanotechnology

Proceedings Article | 20 October 2005 Paper
Proceedings Volume 5965, 596509 (2005) https://doi.org/10.1117/12.624791
KEYWORDS: Sensors, Mirrors, Interferometers, Microscopes, Calibration, Holograms, Diffraction, Sensor technology, Integrated optics, Metrology

Proceedings Article | 13 June 2005 Paper
Proceedings Volume 5856, (2005) https://doi.org/10.1117/12.612887
KEYWORDS: Sensors, Holograms, CCD image sensors, Semiconductor lasers, Calibration, Standards development, Laser development, CCD cameras, Microscopes, Optical scanning

Proceedings Article | 14 February 2005 Paper
Proceedings Volume 5776, (2005) https://doi.org/10.1117/12.611848
KEYWORDS: Sensors, Mirrors, Interferometers, System integration, Sensor technology, Calibration, Scanning probe microscopy, Photomasks, Wafer inspection, Metrology

Showing 5 of 15 publications
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