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Robb Fang
at Hangzhou Cobetter Filtration Equipment Co Ltd
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 9 April 2024 Poster + Paper
New PE filter for advanced photolithography process
Jinhong Yu, Mengze Chen, Robb Fang, Yoshiaki Yamada
Proceedings Volume 12957, 129571P (2024) https://doi.org/10.1117/12.3010100
KEYWORDS: Tunable filters, Metals, Particles, Bridges, Materials properties, Photoresist materials, Polyethylene, Optical lithography, Crystals, Thermodynamics
Proceedings Article | 1 May 2023 Poster + Paper
Metal purifier for TMAH developer solution
Jinhong Yu, Robb Fang, Yoshiaki Yamada
Proceedings Volume 12498, 124981D (2023) https://doi.org/10.1117/12.2654118
KEYWORDS: Metals, Ion exchange, Polyethylene, Contamination, Ions, Photoresist processing, Photoresist developing, Semiconductors
Proceedings Article | 13 June 2022 Poster
Considerations on polymer removal mechanism by filter membrane
Yoshiaki Yamada, Robb Fang, Jay Zhou, Nicole Wang
Proceedings Volume PC12055, PC120550N (2022) https://doi.org/10.1117/12.2611689
KEYWORDS: Polymers, Polymerization, Manufacturing
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