Mr. Richard R. Freeman Profile

Richard R. Freeman

Managing Director/Co-Founder at Zeeko Ltd

SPIE Involvement:

Author

Publications (23)

Proceedings Article | 20 November 2017 Open Access

Design and development by direct polishing of the WFXT thin polynomial mirror shells

L. Proserpio, S. Campana, O. Citterio, M. Civitani, H. Combrinck, P. Conconi, V. Cotroneo, R. Freeman, E. Mattini, P. Langstrof, R. Morton, G. Motta, O. Oberle, G. Pareschi, G. Parodi, C. Pels, C. Schenk, R. Stock, G. Tagliaferri

Proceedings Volume 10565, 105652N (2017) https://doi.org/10.1117/12.2309176

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Proceedings Article | 9 September 2013 Paper

Finishing of EUV photomask substrates by CNC precessed bonnet polisher

Anthony Beaucamp, Yoshiharu Namba, Phillip Charlton, Richard Freeman

Proceedings Volume 8880, 888018 (2013) https://doi.org/10.1117/12.2026198

KEYWORDS: Polishing, Photomasks, Extreme ultraviolet, Chemical mechanical planarization, Surface roughness, Surface finishing, Extreme ultraviolet lithography, Head, Polishing equipment, Excimers

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Proceedings Article | 7 September 2013 Paper

Development of hybrid fluid jet/float polishing process

Anthony T. Beaucamp, Yoshiharu Namba, Richard Freeman

Proceedings Volume 8838, 88380P (2013) https://doi.org/10.1117/12.2023919

KEYWORDS: Polishing, Surface finishing, Particles, Abrasives, Computational fluid dynamics, Fluid dynamics, X-ray optics, 3D modeling, Process modeling, Aspheric lenses

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Proceedings Article | 15 October 2012 Paper

Automated finishing of diamond turned dies for hard x-ray and EUV optics replication

Anthony Beaucamp, Yoshiharu Namba, Richard Freeman

Proceedings Volume 8502, 85020F (2012) https://doi.org/10.1117/12.929632

KEYWORDS: Polishing, Surface finishing, X-rays, Diamond turning, Diamond, Hard x-rays, Nickel, Space telescopes, X-ray telescopes, EUV optics

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Proceedings Article | 27 September 2012 Paper

Thin glass shell oriented to wide field x-ray telescope

M. Civitani, O. Citterio, S. Campana, P. Conconi, E. Mattaini, G. Pareschi, G. Tagliaferri, G. Parodi, V. Burwitz, G. Hartner, J. Arnold, S. Schuler, H. Combrinck, R. Freeman, R. Morton, P. Simpson, D. Walker

Proceedings Volume 8443, 84430Q (2012) https://doi.org/10.1117/12.925906

KEYWORDS: X-rays, Calibration, X-ray telescopes, Polishing, Glasses, Atomic force microscopy, Sensors, Silica, Mirrors, Metrology

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Proceedings Article | 12 October 2011 Paper

Progress on precise grinding and polishing of thin glass monolithic shell (towards WFXT)

O. Citterio, M. Civitani, J. Arnold, S. Campana, H. Combrinck, P. Conconi, V. Cotroneo, R. Freeman, E. Mattaini, R. Morton, G. Motta, G. Pareschi, G. Parodi, L. Proserpio, S. Schuler, P. Simpson, G. Tagliaferri, D. Walker

Proceedings Volume 8147, 814714 (2011) https://doi.org/10.1117/12.895309

KEYWORDS: Polishing, Mirrors, Surface finishing, Glasses, Silica, X-ray telescopes, X-rays, Spatial resolution, Off axis mirrors, Manufacturing

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Proceedings Article | 27 September 2011 Paper

Fluid jet and bonnet polishing of optical moulds for application from visible to x-ray

Anthony Beaucamp, Richard Freeman, Akihiro Matsumoto, Yoshiharu Namba

Proceedings Volume 8126, 81260U (2011) https://doi.org/10.1117/12.905491

KEYWORDS: Polishing, Surface finishing, Diamond, Nickel, Radium, Tungsten, Aspheric lenses, Abrasives, X-rays, Optics manufacturing

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Proceedings Article | 29 July 2010 Paper

Design and development of thin quartz glass WFXT polynomial mirror shells by direct polishing

L. Proserpio, S. Campana, O. Citterio, M. Civitani, H. Combrinck, P. Conconi, V. Cotroneo, R. Freeman, P. Langstrof, E. Mattaini, R. Morton, B. Oberle, G. Pareschi, G. Parodi, C. Pels, C. Schenk, R. Stock, G. Tagliaferri

Proceedings Volume 7732, 77320D (2010) https://doi.org/10.1117/12.857418

KEYWORDS: Mirrors, Polishing, Quartz, Glasses, Metrology, X-ray telescopes, X-rays, Surface finishing, Spatial resolution, Silicon carbide

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The Wide Field X-ray Telescope (WFXT) is a medium class mission for X-ray surveys of the sky with an unprecedented area and sensitivity. In order to meet the effective area requirement, the design of the optical system is based on very thin mirror shells, with thicknesses in the 1-2 mm range. In order to get the desired angular resolution (10 arcsec requirement, 5 arcsec goal) across the entire 1x1 degree FOV (Field Of View), the design of the optical system is based on nested modified grazing incidence Wolter-I mirrors realized with polynomial profiles, focal plane curvature and plate scale corrections. This design guarantees an increased angular resolution at large off-axis angle with respect to the normally used Wolter I configuration, making WFXT ideal for survey purposes. The WFXT X-ray Telescope Assembly is composed by three identical mirror modules of 78 nested shells each, with diameter up to 1.1 m. The epoxy replication process with SiC shells has already been proved to be a valuable technology to meet the angular resolution requirement of 10 arcsec. To further mature the telescope manufacturing technology and to achieve the goal of 5 arcsec, a deterministic direct polishing method is under investigation. The direct polishing method has already been used for past missions (as Einstein, Rosat, Chandra): the technological challenge now is to apply it for almost ten times thinner shells. Under investigation is quartz glass (fused silica), a well-known material with good thermo-mechanical and polishability characteristics that could meet our goal in terms of mass and stiffness, with significant cost and time saving with respect to SiC. Our approach is based on two main steps: first quartz glass tubes available on the market are grinded to conical profiles, and second the obtained shells are polished to the required polynomial profiles by CNC (Computer Numerical Control) polishing machine. In this paper, the first results of the direct grinding and polishing of prototypes shells made by quartz glass with low thickness, representative of the WFXT optical design, are presented.

Proceedings Article | 23 July 2008 Paper

Active control of edges and global microstructure on segmented mirrors

D. Walker, A. Beaucamp, C. Dunn, R. Evans, R. Freeman, R. Morton, S. Wei, G. Yu

Proceedings Volume 7018, 701812 (2008) https://doi.org/10.1117/12.787930

KEYWORDS: Polishing, Surface finishing, Raster graphics, Zerodur, Large telescopes, Segmented mirrors, Mirrors, Radium, Infrared radiation, Microfluidics

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Proceedings Article | 18 July 2008 Paper

Removal of diamond-turning signatures on x-ray mandrels and metal optics by fluid-jet polishing

A. Beaucamp, R. Freeman, R. Morton, Karthik Ponudurai, D. Walker

Proceedings Volume 7018, 701835 (2008) https://doi.org/10.1117/12.787960

KEYWORDS: Surface finishing, Polishing, Mirrors, Aspheric lenses, X-rays, Microfluidics, Metal optics, Metals, Diffraction, Servomechanisms

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Proceedings Article | 21 September 2007 Paper

A quantitative comparison of three grolishing techniques for the Precessions process

D. Walker, A. Baldwin, R. Evans, R. Freeman, S. Hamidi, P. Shore, X. Tonnellier, S. Wei, C. Williams, G. Yu

Proceedings Volume 6671, 66711H (2007) https://doi.org/10.1117/12.735488

KEYWORDS: Polishing, Silicon carbide, Diamond, Surface finishing, Zerodur, Abrasives, Polyurethane, Raster graphics, Nickel, Aluminum

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Proceedings Article | 31 August 2006 Paper

Commissioning of the first Precessions 1.2m CNC polishing machines for large optics

D. Walker, A. T. H. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, G. McCavana, R. Morton, D. Riley, J. Simms, G. Yu, X. Wei

Proceedings Volume 6288, 62880P (2006) https://doi.org/10.1117/12.684091

KEYWORDS: Polishing, Surface finishing, Polishing equipment, Aspheric lenses, Raster graphics, Spherical lenses, Optics manufacturing, Polyurethane, Oxides, Crystals

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Proceedings Article | 27 July 2006 Paper

Automated optical fabrication: first results from the new Precessions 1.2m CNC polishing machine

D. Walker, A. T. H. Beaucamp, V. Doubrovski, C. Dunn, R. Evans, R. Freeman, J. Kelchner, G. McCavana, R. Morton, D. Riley, J. Simms, G. Yu, X. Wei

Proceedings Volume 6273, 627309 (2006) https://doi.org/10.1117/12.671098

KEYWORDS: Polishing, Surface finishing, Astronomical imaging, Metrology, Polishing equipment, Mirrors, Spherical lenses, Computer programming, Control systems, Optical fabrication

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Proceedings Article | 20 October 2005 Paper

Recent advances in the control of form and texture on free-form surfaces

D. Walker, A. Beaucamp, V. Doubrovski, C. Dunn, R. Freeman, G. Hobbs, G. McCavana, R. Morton, D. Riley, J. Simms, X. Wei

Proceedings Volume 5965, 59650S (2005) https://doi.org/10.1117/12.625796

KEYWORDS: Polishing, Surface finishing, Metrology, Profilometers, Interferometers, Aspheric lenses, Telescopes, Mirrors, Large telescopes, Spherical lenses

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Proceedings Article | 24 August 2005 Paper

New results extending the Precessions process to smoothing ground aspheres and producing freeform parts

D. Walker, A. T. H. Beaucamp, V. Doubrovski, C. Dunn, R. Freeman, G. McCavana, R. Morton, D. Riley, J. Simms, X. Wei

Proceedings Volume 5869, 58690E (2005) https://doi.org/10.1117/12.617067

KEYWORDS: Polishing, Surface finishing, Diamond, Aspheric lenses, Abrasives, Metals, Spherical lenses, Lens grinding equipment, Interferometers, Large telescopes

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Proceedings Article | 14 October 2004 Paper

Recent developments of Precessions polishing for larger components and free-form surfaces

David Walker, Anthony Beaucamp, David Brooks, V. Doubrovski, Matthew Cassie, C. Dunn, Richard Freeman, Andrew King, M. Libert, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 5523, (2004) https://doi.org/10.1117/12.559531

KEYWORDS: Polishing, Surface finishing, Interferometers, Aspheric lenses, Metrology, Mirrors, Interferometry, Control systems, Raster graphics, Optical spheres

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Proceedings Article | 24 September 2004 Paper

New results from the Precessions polishing process scaled to larger sizes

David Walker, Anthony Beaucamp, David Brooks, V. Doubrovski, Matthew Cassie, C. Dunn, Richard Freeman, Andrew King, M. Libert, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 5494, (2004) https://doi.org/10.1117/12.553044

KEYWORDS: Polishing, Surface finishing, Interferometers, Mirrors, Metrology, Optical spheres, Aspheric lenses, Interferometry, Spatial frequencies, Distortion

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Proceedings Article | 22 December 2003 Paper

Precessions aspheric polishing: new results from the development program

David Walker, Anthony Beaucamp, Richard Bingham, David Brooks, Richard Freeman, Sug-Whan Kim, Andrew King, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.507462

KEYWORDS: Polishing, Surface finishing, Aspheric lenses, Spherical lenses, Mirrors, Metrology, Optical spheres, Zerodur, Large telescopes, Polyurethane

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Proceedings Article | 30 January 2003 Paper

Precessions process for efficient production of aspheric optics for large telescopes and their instrumentation

David Walker, A. Beaucamp, Richard Bingham, David Brooks, Richard Freeman, Sowoon Kim, Andrew King, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 4842, (2003) https://doi.org/10.1117/12.456677

KEYWORDS: Polishing, Aspheric lenses, Surface finishing, Mirrors, Diffraction, Image segmentation, Astronomy, Large telescopes, Spherical lenses, Wavefronts

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Proceedings Article | 16 October 2002 Paper

Novel CNC polishing process for control of form and texture on aspheric surfaces

David Walker, A. Beaucamp, David Brooks, Richard Freeman, Andrew King, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 4767, (2002) https://doi.org/10.1117/12.451322

KEYWORDS: Polishing, Surface finishing, Aspheric lenses, Process control, Raster graphics, Spherical lenses, Mirrors, Astronomy, Polishing equipment, Optical instrument design

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Proceedings Article | 5 February 2002 Paper

Zeeko/UCL process for polishing large lenses and prisms

David Walker, Richard Freeman, Gerry McCavana, Roger Morton, David Riley, John Simms, David Brooks, Eugene Kim, Andrew King

Proceedings Volume 4411, (2002) https://doi.org/10.1117/12.454877

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Proceedings Article | 27 December 2001 Paper

First aspheric form and texture results from a production machine embodying the precession process

David Walker, David Brooks, Richard Freeman, Andrew King, Gerry McCavana, Roger Morton, David Riley, John Simms

Proceedings Volume 4451, (2001) https://doi.org/10.1117/12.453652

KEYWORDS: Polishing, Aspheric lenses, Surface finishing, Control systems, Metrology, Polishing equipment, Spatial frequencies, Polyurethane, Radium, Mirrors

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