Randall G. Smith
at nLine Corp
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 May 2005 Paper
Randy Smith, Sean Collins
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.620070
KEYWORDS: Inspection, Semiconducting wafers, Scanning electron microscopy, Defect inspection, Wafer inspection, Image processing, Defect detection, Electron microscopes, Image analysis, Semiconductors

Proceedings Article | 15 July 2003 Paper
Mark Schulze, Martin Hunt, Edgar Voelkl, Joel Hickson, William Usry, Randall Smith, Robert Bryant, C. Thomas
Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485237
KEYWORDS: Digital holography, Semiconducting wafers, Defect detection, Inspection, Scanning electron microscopy, Visualization, Holograms, Wavefronts, Digital imaging, Image visualization

Proceedings Article | 12 July 2002 Paper
C. Thomas, Tracy Bahm, Larry Baylor, Philip Bingham, Steven Burns, Matt Chidley, Long Dai, Robert Delahanty, Christopher Doti, Ayman El-Khashab, Robert Fisher, Judd Gilbert, James Goddard, Gregory Hanson, Joel Hickson, Martin Hunt, Kathy Hylton, George John, Michael Jones, Ken Macdonald, Michael Mayo, Ian McMackin, Dave Patek, John Price, David Rasmussen, Louis Schaefer, Thomas Scheidt, Mark Schulze, Philip Schumaker, Bichuan Shen, Randall Smith, Allen Su, Kenneth Tobin, William Usry, Edgar Voelkl, Karsten Weber, Paul Jones, Robert Owen
Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475659
KEYWORDS: Holograms, Digital holography, Holography, Semiconducting wafers, Cameras, Deep ultraviolet, Spatial frequencies, Beam splitters, Digital video recorders, Fourier transforms

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