Mr. Peter Corkery Profile

Peter Corkery

at Johns Hopkins Univ

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 9 April 2024 Presentation + Paper

Amorphous zinc-imidazolate all-dry resists

Kayley Waltz, Patrick Eckhert, Peter Corkery, Mueed Ahmad, Andrea Kraetz, Yurun Miao, Dennis Lee, Mohammed Abdel-Rahman, Yucheng Lan, Paul Haghi-Ashtiani, Aaron Stein, J. Anibal Boscoboinik, Michael Tsapatsis, D. Howard Fairbrother

Proceedings Volume 12957, 129570H (2024) https://doi.org/10.1117/12.3010916

KEYWORDS: Etching, Electron beam lithography, Plasma etching, Lithography, Photoresist developing

Read Abstract +

With the adoption of extreme ultraviolet lithography (EUVL) to decrease microelectronic device dimensions, recent photoresist research has focused on the development of next generation metal-organic resist materials. To enhance lithographic capabilities and mitigate common drawbacks seen from traditional solvent based processes like spin coating and solution phase development, interest has shifted towards solvent-free “dry” deposition and development. These dry techniques can obviate extra processing steps, significantly reduce the amount of solvent waste generated, and even allow for reduced defect density and higher resolution. The process described herein avoids the use of solvents, and ultimately many issues associated with solvents, by depositing metal-organic resists using atomic/molecular layer deposition (ALD/MLD) and developing them using a selective thermal dry etching process. The low temperature (e.g., 100-120°C) thermal development conditions used in this study are notable in the context of lithography processes, as the high temperatures required in other dry etching processes can be difficult to implement in nanofabrication processes. Our previous work has focused on using amorphous zinc-imidazolate (aZnMIm) films in an all-dry resist technology, achieving resolution down to 22nm. Here, we explore the role of temperature and time on dry development and examine pattern transfer into silicon substrates. Preliminary pattern transfer experiments suggest that an etch selectivity of at least 7:1 exists for electron-beam treated aZnMIm over silicon using a pseudo-Bosch plasma etch. Our findings demonstrate the feasibility of dry development at lower temperatures and times and suggest potential for aZnMIm as a high-resolution resist for nextgeneration lithography.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years