A 4*4 MEMS tunable FPF array for the full spectral range of three to five μm is designed. Different designs of quarter-wave optical thickness layer stacks reflectors and have been developed and analyzed. The better reflector with a broader reflectance spectrum and a lower phase shift was applied to completed FPF. The influence of both incident angel and cone angel of incident beam of FPF on transmittance spectrum have been investigated. For this device, each filter with different original optical cavity length can be electrostatically actuated individually. It may have the potential to applied to snap-shot multispectral imager and spectrometer.
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