Dr. Patrick M. Mayrhofer Profile

Dr. Patrick M. Mayrhofer

at IMS Nanofabrication GmbH

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Publications (1)

Proceedings Article | 21 May 2015 Paper

High temperature stability of ScxAl1-xN (x=0.27) thin films

P. Mayrhofer, A. Bittner, U. Schmid

Proceedings Volume 9517, 95171C (2015) https://doi.org/10.1117/12.2178503

KEYWORDS: Argon, Thin films, Annealing, Crystals, Aluminum nitride, Temperature metrology, Scandium, Microelectromechanical systems, Absorbance, FT-IR spectroscopy

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