Dr. Nathan Stafford Profile

Dr. Nathan Stafford

Group Manager at Air Liquide

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Publications (3)

Proceedings Article | 9 April 2024 Presentation + Paper

Green chemistry for SiN etch

Nathan Stafford, Colin Jennings, Scott Biltek, Phong Nguyen, Yichen Yao

Proceedings Volume 12958, 129580N (2024) https://doi.org/10.1117/12.3021929

KEYWORDS: Semiconductors, Etching, Silicon nitride, Chemistry, Carbon monoxide, Plasma etching, FT-IR spectroscopy, Plasma, Molecules, Gases, Semiconducting wafers

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Proceedings Article | 1 May 2023 Presentation + Paper

Advances in low GWP etch gasses

Colin Jennings, Phong Nguyen, Scott Biltek, Nathan Stafford

Proceedings Volume 12499, 124990G (2023) https://doi.org/10.1117/12.2660136

KEYWORDS: Etching, Gases, Plasma etching, Chemistry, Vacuum chambers, Climate change, Plasma, Semiconducting wafers, FT-IR spectroscopy, Environmental monitoring

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Proceedings Article | 20 March 2019 Paper

Ultrahigh selective etching of Si3N4 over SiO2 using plasma-less dry process for 3D-NAND device applications

Chih-Yu Hsu, Peng Shen, Nathan Stafford

Proceedings Volume 10963, 109630M (2019) https://doi.org/10.1117/12.2504426

KEYWORDS: Etching, Silicon, Semiconducting wafers, Chemistry, Dry etching, Silica, Plasma etching, Temperature metrology, Isotropic etching, High aspect ratio silicon micromachining

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