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Myeongdong Lee
at SAMSUNG Electronics Co Ltd
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Publications (1)
Proceedings Article | 29 March 2013 Paper
A novel methodology for building robust design rules by using design based metrology (DBM)
Myeongdong Lee, Seiryung Choi, Jinwoo Choi, Jeahyun Kim, Hyunju Sung, Hyunyoung Yeo, Myoungseob Shim, Gyoyoung Jin, Eunseung Chung, Yonghan Roh
Proceedings Volume 8684, 86840Q (2013) https://doi.org/10.1117/12.2009583
KEYWORDS: Critical dimension metrology, Inspection, Metrology, Semiconducting wafers, Silicon, Photomasks, Optical proximity correction, Lithography, Structural design, Quantitative analysis
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