Mr. Mingxue Huo Profile

Mingxue Huo

at Harbin Institute of Technology

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 1 November 2007 Paper

Design, simulation, and fabrication of a silicon micro flat heat pipe with axial triangle grooves

Xiaowei Liu, Lei Xu, Xin Xin, Mingxue Huo

Proceedings Volume 6423, 642309 (2007) https://doi.org/10.1117/12.779210

KEYWORDS: Liquids, Silicon, Convection, Semiconducting wafers, Prototyping, Numerical simulations, Glasses, Fabrication, Device simulation, Anisotropic etching

Read Abstract +

Proceedings Article | 30 December 2004 Paper

A high-g overload-protected accelerometer with a novel microstructure

Weiping Chen, Wei Wang, Lei Tian, Xiaowei Liu, Mingxue Huo, Ruichao Zhang, Deyin Zhang

Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.581191

KEYWORDS: Wheatstone bridges, Finite element methods, Bridges, Silicon, Resistance, Sensors, Beam shaping, Computer simulations, Optical simulations, Etching

Read Abstract +

Proceedings Article | 24 April 2003 Paper

Simulation of bulk micromachined vibration sensor with low noise

Xiaowei Liu, Mingxue Huo, Weiping Chen, Qiang Chen

Proceedings Volume 5116, (2003) https://doi.org/10.1117/12.498848

KEYWORDS: Sensors, Finite element methods, Microelectromechanical systems, Bulk micromachining, Silicon, Optical simulations, Vibration simulation, Deep reactive ion etching, Structural design, Microelectronics

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years