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Min Xiang
at SIMIT
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Publications (1)
Proceedings Article | 30 April 2004 Paper
A novel method of fabricating Fabry-Perot cavity employing MEMS wet-etching process
Min Xiang, Yanmin Cai, Yaming Wu, Jianyi Yang, Yuelin Wang
Proceedings Volume 5279, (2004) https://doi.org/10.1117/12.521680
KEYWORDS: Semiconducting wafers, Mirrors, Silicon, Microelectromechanical systems, Polishing, Fabry–Perot interferometers, Surface finishing, Reflectivity, Fabry–Perot interferometry, Chemical elements
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