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Mikiya Ikuchi
at Osaka Univ
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Publications (1)
Proceedings Article | 21 August 2020 Presentation + Paper
Uncertainty of figure error measurement by non-contact three dimensional nano-profiler using normal vector tracing method
Kota Hashimoto, Takeshi Ashizawa, Mikiya Ikuchi, Katsuyoshi Endo
Proceedings Volume 11492, 1149206 (2020) https://doi.org/10.1117/12.2567841
KEYWORDS: Computer programming, Error analysis, Calibration, 3D metrology, Spherical lenses, Optical components, Motion measurement, Mirrors, Interferometers
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