Dr. Michael Jordan Profile

Dr. Michael Jordan

Principal at Colibre Solutions

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Publications (2)

SPIE Journal Paper | 1 February 2002

Semi-empirical model of light scattering from submicron pyramidal pits

Michael Jordan, Rodolfo Diaz, E. Dan Hirleman

OE, Vol. 41, Issue 02, (February 2002) https://doi.org/10.1117/12.10.1117/1.1431252

KEYWORDS: Sensors, Scattering, Scatter measurement, Light scattering, Semiconducting wafers, Silicon, Particles, Optical engineering, Diffraction, Wafer-level optics

Proceedings Article | 5 June 2001 Paper

Analytical first-order model of light scattering from submicron pyramidal pits

Michael Jordan, Rodolfo Diaz, E. Dan Hirleman

Proceedings Volume 4275, (2001) https://doi.org/10.1117/12.429356

KEYWORDS: Scattering, Sensors, Light scattering, Semiconducting wafers, Silicon, Particles, Scatter measurement, Wafer-level optics, Data modeling, Wafer inspection

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