This paper presents results of ablation experiments of NiCr layers with thicknesses ranging from 23nm to 246nm on
Al2O3 substrates. Investigated parameters are fluence, number of pulses, film thickness and substrate roughness. The
influence of the parameters on the removal threshold is analyzed in order to identify stable processing parameters.
Patterned NiCr thin films as an essential component for the measurement of mechanical stress are required for the
development of sputtered thin film strain gages. With this new approach strain sensors will be resistant against creeping
or swelling through changing ambient conditions unlike conventional strain gages.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.