Mr. Michael H. Avngaard Profile

Michael H. Avngaard

at DTU Space

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Publications (1)

Proceedings Article | 7 September 2021 Poster + Paper

Hands-on project aimed at technical education: realizing a DC magnetron sputtering system

S. Massahi, D. D. Ferreira, Michael Avngaard, A. Christensen, D. Haugbølle, K. Jensen, I. Mejnertz, J. Selsner, M. Westermann, R. Fléron, F. Christensen, N. Gellert, S. Svendsen, P. Henriksen, A. 'S Jegers

Proceedings Volume 11815, 118150Q (2021) https://doi.org/10.1117/12.2594434

KEYWORDS: Sputter deposition, Plasma, Glasses, Power supplies, Thin film coatings, Aluminum, Copper, Silicon, Computer aided design, Aerospace engineering

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