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Mengjiao Xia
at SIMIT
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Publications (1)
Proceedings Article | 24 January 2013 Paper
Reactive etching of a novel phase change material Si2Sb2Te3
Mengjiao Xia, Feng Rao, Zhitang Song, Kun Ren, Liangcai Wu, Bo Liu
Proceedings Volume 8782, 87820Z (2013) https://doi.org/10.1117/12.2016674
KEYWORDS: Etching, Tellurium, Antimony, Argon, Silicon, Scanning electron microscopy, Surface roughness, Reactive ion etching, Photoemission spectroscopy, Plasma
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