Dr. Maya Wehbe Profile

Dr. Maya Wehbe

at CEA-LETI

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Publications (1)

Proceedings Article | 21 March 2023 Presentation

Controlled nanopatterning and plasma etching of sub-100 nm nanopillars for low dislocation density of pendeo-epitaxy GaN: Towards MicroDisplays

Nabil Labchir, Saber Hammami, Kilian Baril, Maya Wehbe, Sébastien Labau, Camille Petit-Etienne, Blandine Alloing, Ludovic Dupré, Matthew Charles, Jesus Zuniga Perez, Cecile Gourgon

Proceedings Volume PC12421, (2023) https://doi.org/10.1117/12.2649697

KEYWORDS: Gallium nitride, Nanostructures, Plasma etching, Light emitting diodes, Optoelectronics, Nanolithography, Optoelectronic devices, Nanoimprint lithography, Crystals, Solid state lighting

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