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Masaki Kimura
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Publications (1)
Proceedings Article | 22 March 2016 Paper
Prediction of positioning error in EB lithography
Masaki Kimura, Kazuo Goda
Proceedings Volume 9777, 977717 (2016) https://doi.org/10.1117/12.2218252
KEYWORDS: Photomasks, Metals, Quartz, Lithography, Electron beams, Convolution, Process control, Optical simulations, Computer simulations, Roads, Ions, Neodymium, Electroluminescence, Distributed interactive simulations, Error analysis, Electron beam lithography
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