KEYWORDS: Transmission electron microscopy, Scanning electron microscopy, Oxygen, Nanorobotics, Electron microscopes, Carbon nanotubes, Nanomanipulation, Nanolithography, Electron beams, Tungsten
Today robotic technology can be developed and advanced a lot from industrial robotic manipulation to the micro and
nano manipulations. We have been proposed "Nano Laboratory" consisted of the capabilities of nanofabrication,
nanoinstrumentaion and nanoassembly to make three dimensional structure, devices and systems in the nanoworld. First
the nanorobotic manipulation system is introduced to realize these capabilities inside a scanning electron microscope
(SEM) and a transmission electron microscope (TEM). Then some precursors are introduced into the working small
space in the nanoworld, so that the cutting, bending and fixing operation in the nanoworld will be realized using
nanomanipulator, electron-bean-induced deposition (EBID) and other methodologies as in the macro world. After
making the three dimensional structure, nano devices such as sensor and actuator can be fabricated.
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