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Martin Jurna
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (4)
Proceedings Article | 10 April 2024 Presentation + Paper
High-power EUV light sources (>500w) for high throughput in next-generation EUV lithography tools
Klaus Hummler, Qiushi Zhu, Keegan Behm, Liane Matthes, Zhaohan He, Omar Biabani, Andrew LaForge, Bob Rollinger, Dustin Urone, Niek Kleemans, Martin Jurna, Sean McGrogan, Peter Mayer, Michael Purvis, Sander Derks, Alberto Villalta, Abhiram Govindaraju, Yue Ma, Daniel Brown
Proceedings Volume 12953, 129530V (2024) https://doi.org/10.1117/12.3010463
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Plasma, Carbon monoxide, Light sources, Tin, Semiconducting wafers, Scattering, Scanners, Gas lasers
Proceedings Article | 26 February 2010 Paper
Vibrational phase contrast CARS microscopy for quantitative analysis
M. Jurna, E. Garbacik, J. Korterik, C. Otto, J. Herek, H. Offerhaus
Proceedings Volume 7569, 75690F (2010) https://doi.org/10.1117/12.840178
KEYWORDS: Signal detection, Optical parametric oscillators, Molecules, Refractive index, Oscillators, Interferometry, Raman spectroscopy, Water, Heterodyning, Phase contrast
Proceedings Article | 13 February 2009 Paper
Background free CARS imaging by local phase detection
M. Jurna, J. Korterik, C. Otto, L. Herek, H. Offerhaus
Proceedings Volume 7183, 718310 (2009) https://doi.org/10.1117/12.807714
KEYWORDS: Raman spectroscopy, Heterodyning, Phase measurement, Signal detection, Optical parametric oscillators, Interferometry, CARS tomography, Amplifiers, Modulation, Signal generators
Proceedings Article | 15 February 2008 Paper
Shot noise limited heterodyne detection of CARS signals
M. Jurna, E. Büttner, J. Korterik, C. Otto, I. Rimke, H. Offerhaus
Proceedings Volume 6860, 68600R (2008) https://doi.org/10.1117/12.761641
KEYWORDS: Signal detection, Interference (communication), Optical parametric oscillators, Oscillators, Heterodyning, Signal to noise ratio, Sensors, Photodiodes, Crystals, Microscopy
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