Dr. Martin Grabherr Profile

Dr. Martin Grabherr

General Manager & Owner at Priolas GmbH

SPIE Involvement:

Conference Program Committee | Author

Area of Expertise:

VCSEL , semiconductor laser manufacturing , TDLAS

Websites:

Company Website

Profile Summary

- PhD in Electrical Engineering in the field of VCSEL technology from University of Ulm, Germany
- co-founder of U-L-M Photonics, VCSEL manufacturer established in 2000
- founder of Priolas GmbH established in 2017, developing and selling 760 nm VCSELs; consulting in VCSEL technology

Publications (29)

Proceedings Article | 13 March 2024 Presentation + Paper

Presentation + Paper

Advanced single-mode VCSEL fiber pigtail

M. Grabherr, M. Zorn, Lin Borowski

Proceedings Volume 12904, 129040C (2024) https://doi.org/10.1117/12.3000185

KEYWORDS: Oxygen, Absorption spectroscopy, Tunable diode lasers, Vertical cavity surface emitting lasers, Single mode fibers

Read Abstract +

Proceedings Article | 3 March 2022 Presentation + Paper

Presentation + Paper

Most resilient single-mode VCSEL

M. Grabherr, Martin Zorn

Proceedings Volume 12020, 120200G (2022) https://doi.org/10.1117/12.2610097

KEYWORDS: Absorption spectroscopy, Laser spectroscopy, Vertical cavity surface emitting lasers, Oxidation, Etching, Polarization, Sensors

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Proceedings Article | 20 June 2021 Presentation

Presentation

Picometer spectrally stabilized dual-VCSEL source for snapshot multiple-wavelength digital holography

Daniel Claus, Igor Alekseenko, Martin Grabherr, Raimund Hibst

Proceedings Volume 11782, 1178207 (2021) https://doi.org/10.1117/12.2592675

KEYWORDS: Vertical cavity surface emitting lasers, Scattering, Digital holography, Inspection, Manufacturing, Light scattering, Data acquisition, Fiber couplers, Confocal microscopy, Spectroscopy

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In-line inspection during the manufacturing process to evaluate topography related parameters has increasingly become important. However, it imposes strong requirements and the in-line inspection systems. Two of the most established optical metrology techniques that can cope well with different surface materials are white light interference microscopy and confocal microscopy. However, the measurement process is very time-consuming. Another technique, which offers single-shot capability and hence fast data acquisition is structured illumination, but restricted to the inspection of rough scattering surfaces only. Multiple-wavelength digital holography (MWDH) offers the possibility to overcome the aforementioned shortcomings. It can be applied on rough scattering and specular reflective surfaces in a lensless lightweight manner. However, the stability and exact knowledge of the wavelengths employed is crucial for the successful application of MWDH. In this paper, we describe a method to ensure wavelength stability for MWDH. Two VCSELs are mounted on a common heat sink with a distance of a few mm only in order to eliminate the influence of wavelength drift between the two VCSELs caused by different temperature. Moreover, the temperature is stabilized to 20C via a Peltier Element. In addition, the light-emitting surface of the two VCSEL is directly bonded to two corresponding single-mode fibers. Further fiber couplers and a fiber combiner are applied to result in a lightweight, highly robust and flexible setup. Information multiplexing via different angles of the two wavelength corresponding reference waves is introduced to enable single-shot data acquisition. In that manner, disturbances caused by changing environmental conditions as encountered in sequential acquisition are eliminated. The advantages of the VCSEL based MWDH system are demonstrated in comparison to structured illumination on non-cooperative materials (scattering and/or specular samples, samples with different colour properties).

Proceedings Article | 5 March 2021 Presentation + Paper

Presentation + Paper

High performance large aperture NIR single-mode VCSELs

M. Grabherr

Proceedings Volume 11704, 117040C (2021) https://doi.org/10.1117/12.2582357

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Etching, Reliability, Near infrared, Reflectivity, Lithography, Electro optics, Absorption spectroscopy

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Proceedings Article | 24 February 2020 Paper

Paper

76X-nm VCSELs with wide tuning range designed for TDLAS

M. Grabherr

Proceedings Volume 11300, 113000C (2020) https://doi.org/10.1117/12.2554139

KEYWORDS: Temperature metrology, Lithium, Polarizers, Polarization, Oxides

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Proceedings Article | 25 February 2017 Paper

Paper

VCSELs as light source for time-of-flight sensors

Holger Moench, Manuel Frey, Martin Grabherr, Stephan Gronenborn, Ralph Gudde, Johanna Kolb, Michael Miller, Alexander Weigl

Proceedings Volume 10122, 1012204 (2017) https://doi.org/10.1117/12.2249053

KEYWORDS: Vertical cavity surface emitting lasers, Sensors, Light sources, Cameras, Light emitting diodes, Photodiodes, Reliability, Energy efficiency, Resistance, Temperature metrology, Modulation, Photonics, Distance measurement

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Proceedings Article | 4 March 2015 Paper

Paper

New applications boost VCSEL quantities: recent developments at Philips

Martin Grabherr

Proceedings Volume 9381, 938102 (2015) https://doi.org/10.1117/12.2081790

KEYWORDS: Vertical cavity surface emitting lasers, Semiconducting wafers, Sensors, Data communications, Smart sensors, Laser applications, Transceivers, Optical interconnects, Active optics, Computing systems

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Proceedings Article | 27 February 2014 Paper

Paper

VCSEL arrays for high-aggregate bandwidth of up to 1.34 Tbps

Martin Grabherr, Steffan Intemann, Roger King, Stefan Wabra, Roland Jäger, Michael Riedl

Proceedings Volume 9001, 900105 (2014) https://doi.org/10.1117/12.2039226

KEYWORDS: Vertical cavity surface emitting lasers, Picosecond phenomena, Transceivers, Virtual colonoscopy, Semiconducting wafers, Neodymium, Eye, Analog electronics, Microlens array, Photomasks

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Proceedings Article | 20 February 2013 Paper

Paper

25 Gbps and beyond: VCSEL development at Philips

Martin Grabherr, Steffan Intemann, Stefan Wabra, Philipp Gerlach, Michael Riedl, Roger King

Proceedings Volume 8639, 86390J (2013) https://doi.org/10.1117/12.2002029

KEYWORDS: Vertical cavity surface emitting lasers, Quantum wells, Indium gallium arsenide, Virtual colonoscopy, Gallium arsenide, Eye, Electroluminescence, Modulation, Neodymium, Oxides

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Proceedings Article | 6 February 2010 Paper

Paper

120 Gbps VCSEL arrays: fabrication and quality aspects

Martin Grabherr, Steffan Intemann, Christian Wimmer, Lin Borowski, Roger King, Dieter Wiedenmann, Roland Jäger

Proceedings Volume 7615, 761507 (2010) https://doi.org/10.1117/12.841987

KEYWORDS: Vertical cavity surface emitting lasers, Semiconducting wafers, Temperature metrology, Photonics, Modulation, Picosecond phenomena, Interferometric modulator displays, Etching, Resistance, Capacitance

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Proceedings Article | 7 February 2009 Paper

Paper

Integrated photodiodes complement the VCSEL platform

Martin Grabherr, Philipp Gerlach, Roger King, Roland Jäger

Proceedings Volume 7229, 72290E (2009) https://doi.org/10.1117/12.808847

KEYWORDS: Vertical cavity surface emitting lasers, Photodiodes, Absorption, Diodes, Silicon, Gallium arsenide, Control systems, Lithium, Integration, Laser damage threshold

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Proceedings Article | 1 February 2008 Paper

Paper

Volume production of polarization controlled single-mode VCSELs

Martin Grabherr, Roger King, Roland Jäger, Dieter Wiedenmann, Philipp Gerlach, Denise Duckeck, Christian Wimmer

Proceedings Volume 6908, 690803 (2008) https://doi.org/10.1117/12.760411

KEYWORDS: Polarization, Vertical cavity surface emitting lasers, Semiconducting wafers, Etching, Manufacturing, Laser applications, Polarization control, Photomasks, Laser systems engineering, Diffraction gratings

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Proceedings Article | 7 February 2007 Paper

Paper

New markets for VCSELS: pulsed operation of high-power devices

Martin Grabherr, Michael Miller, Dieter Wiedenmann, Roland Jäger, Roger King

Proceedings Volume 6484, 648407 (2007) https://doi.org/10.1117/12.697047

KEYWORDS: Vertical cavity surface emitting lasers, Pulsed laser operation, Semiconductor lasers, Laser applications, Reliability, Continuous wave operation, Data communications, Light emitting diodes, Laser development

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Proceedings Article | 10 February 2006 Paper

Paper

High volume production of single-mode VCSELs

Dieter Wiedenmann, Martin Grabherr, Roland Jäger, Roger King

Proceedings Volume 6132, 613202 (2006) https://doi.org/10.1117/12.657655

KEYWORDS: Vertical cavity surface emitting lasers, Semiconducting wafers, Packaging, Reliability, Manufacturing, Photonics, Oxides, Signal processing, Atomic clocks, Wafer-level optics

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Proceedings Article | 14 March 2005 Paper

Paper

Fabrication and performance of tuneable single-mode VCSELs emitting in the 750- to 1000-nm range

Martin Grabherr, Dieter Wiedenmann, Roland Jaeger, Roger King

Proceedings Volume 5737, (2005) https://doi.org/10.1117/12.590178

KEYWORDS: Vertical cavity surface emitting lasers, Semiconducting wafers, Oxides, Atomic clocks, Absorption, Cesium, Tolerancing, Optical pumping, Laser sources, Oxidation

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Proceedings Article | 16 June 2004 Paper

Paper

Noise and signal modeling of various VCSEL structures

Angelique Rissons, Julien Perchoux, Jean-Claude Mollier, Martin Grabherr

Proceedings Volume 5364, (2004) https://doi.org/10.1117/12.528967

KEYWORDS: Vertical cavity surface emitting lasers, Oxides, Interference (communication), Quantum wells, Photonics, Reflectors, Resistance, Device simulation, Data communications, Circuit switching

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Proceedings Article | 16 June 2004 Paper

Paper

Commercial VCSELs reach 0.1-W cw output power

Martin Grabherr, Michael Miller, Roland Jaeger, Dieter Wiedenmann, Roger King

Proceedings Volume 5364, (2004) https://doi.org/10.1117/12.528492

KEYWORDS: Vertical cavity surface emitting lasers, Free space optics, High power lasers, Fiber couplers, Photonics, Modulation, Solid state lasers, Lithium, Data communications

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Proceedings Article | 17 June 2003 Paper

Paper

Comparison of approaches to 850-nm 2D VCSEL arrays

Martin Grabherr, Steffan Intemann, Roland Jager, Roger King, Rainer Michalzik, Hendrik Roscher, Dieter Wiedenmann

Proceedings Volume 4994, (2003) https://doi.org/10.1117/12.475739

KEYWORDS: Vertical cavity surface emitting lasers, Modulation, Glasses, Gallium arsenide, Heatsinks, Temperature metrology, Transceivers, Eye, Reliability, Metals

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Proceedings Article | 15 April 2003 Paper

Paper

Fabricating VCSELs in a high-tech start-up

Martin Grabherr, Roland Jaeger, Roger King, Burghard Schneider, Dieter Wiedenmann

Proceedings Volume 4942, (2003) https://doi.org/10.1117/12.476220

KEYWORDS: Vertical cavity surface emitting lasers, Reliability, Photonics, Modulation, Shape memory alloys, Transceivers, Connectors, Resistance, Temperature metrology, Interfaces

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Proceedings Article | 29 August 2002 Paper

Paper

Design and communication applications of short-wavelength VCSELs

Rainer Michalzik, Felix Mederer, Hendrik Roscher, Martin Stach, Heiko Unold, Dieter Wiedenmann, Roger King, Martin Grabherr, Erhard Kube

Proceedings Volume 4905, (2002) https://doi.org/10.1117/12.481017

KEYWORDS: Vertical cavity surface emitting lasers, Free space optics, Waveguides, Data transmission, Transmitters, Data communications, Modulation, Polymer multimode waveguides, Polymers, Receivers

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Proceedings Article | 4 June 2002 Paper

Paper

Speed it up to 10 Gb/s and flip chip it: VCSEL today

Martin Grabherr, Dieter Wiedenmann, Roger King, Roland Jaeger, Burghard Schneider

Proceedings Volume 4649, (2002) https://doi.org/10.1117/12.469225

KEYWORDS: Vertical cavity surface emitting lasers, Modulation, Transceivers, Reliability, Photonics, Resistance, Semiconducting wafers, Metals, Temperature metrology, Wafer testing

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Proceedings Article | 1 May 2000 Paper

Paper

kW/cm^2 VCSEL arrays for high-power applications

Michael Miller, Martin Grabherr, Roland Jaeger, Max Kicherer, Felix Mederer, Karl Ebeling

Proceedings Volume 3946, (2000) https://doi.org/10.1117/12.384376

KEYWORDS: Vertical cavity surface emitting lasers, Resistance, Copper, Mirrors, Modulation, Free space, Data transmission, Solid state lasers, Pulsed laser operation

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Proceedings Article | 12 November 1999 Paper

Paper

Shot-noise-limited VCSELs for high-speed fiber optic data transmission

Roland Jaeger, Dieter Wiedenmann, Martin Grabherr, Christian Jung, Max Kicherer, Roger King, Felix Mederer, Michael Miller, Peter Schnitzer, Karl Ebeling

Proceedings Volume 3896, (1999) https://doi.org/10.1117/12.370371

KEYWORDS: Vertical cavity surface emitting lasers, Modulation, Data transmission, Single mode fibers, Photodiodes, Quantum efficiency, Silicon, Gallium arsenide, Polarization, Transmitters

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Proceedings Article | 29 April 1999 Paper

Paper

64-channel flip-chip-mounted selectively oxidized GaAs VCSEL array for parallel optical interconnects

Christian Jung, Roger King, Roland Jaeger, Martin Grabherr, Franz Eberhard, Rudolf Roesch, Ulrich Martin, Dieter Wiedenmann, Heiko Unold, Rainer Michalzik, Karl Ebeling

Proceedings Volume 3627, (1999) https://doi.org/10.1117/12.347096

KEYWORDS: Vertical cavity surface emitting lasers, Silicon, Gallium arsenide, Packaging, Data transmission, Optical interconnects, Beam steering, Metals, Optical arrays, Free space optics

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Proceedings Article | 14 April 1999 Paper

Paper

Infrared light-emitting diodes with lateral outcoupling taper for high extraction efficiency

Wolfgang Schmid, Franz Eberhard, Markus Schauler, Martin Grabherr, Roger King, Michael Miller, Eckard Deichsel, G. Stareev, Ulrich Martin, Roland Jaeger, J. Joos, Rainer Michalzik, Karl Ebeling

Proceedings Volume 3621, (1999) https://doi.org/10.1117/12.344478

KEYWORDS: Light emitting diodes, Mirrors, Ray tracing, Reflectivity, Quantum efficiency, Reflection, Gold, Infrared radiation, Semiconductors, Resistance

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Proceedings Article | 22 June 1998 Paper

Paper

Progress in high-power VCSELs and arrays

Rainer Michalzik, Martin Grabherr, Roland Jaeger, Michael Miller, Karl Ebeling

Proceedings Volume 3419, 34190P (1998) https://doi.org/10.1117/12.311008

KEYWORDS: Vertical cavity surface emitting lasers, High power lasers, Oxides, Continuous wave operation

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Proceedings Article | 22 May 1998 Paper

Paper

Highly efficient oxide-confined VCSEL arrays for parallel optical interconnects

Christian Jung, Roger King, Roland Jaeger, Martin Grabherr, Franz Eberhard, Rainer Michalzik, Karl Ebeling

Proceedings Volume 3490, (1998) https://doi.org/10.1117/12.308841

KEYWORDS: Vertical cavity surface emitting lasers, Gallium arsenide, Modulation, Quantum wells, Indium gallium arsenide, Quantum efficiency, Oxides, Optical arrays, Optical interconnects, Multimode fibers

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Proceedings Article | 20 April 1998 Paper

Paper

High-power VCSELs: modeling and experimental characterization

Rainer Michalzik, Martin Grabherr, Karl Ebeling

Proceedings Volume 3286, (1998) https://doi.org/10.1117/12.305461

KEYWORDS: Vertical cavity surface emitting lasers, Resistance, Oxides, Diffusion, Quantum wells, Quantum efficiency, Reflectors, Resonators, Temperature metrology, Copper

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Proceedings Article | 20 April 1998 Paper

Paper

Oxide-confined 2D VCSEL arrays for high-density inter/intra-chip interconnects

Roger King, Rainer Michalzik, Christian Jung, Martin Grabherr, Franz Eberhard, Roland Jaeger, Peter Schnitzer, Karl Ebeling

Proceedings Volume 3286, (1998) https://doi.org/10.1117/12.305445

KEYWORDS: Vertical cavity surface emitting lasers, Modulation, Quantum efficiency, Optical interconnects, Transmitters, CMOS technology, Oxides, Semiconductor lasers, Silicon, Multimode fibers

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Showing 5 of 29 publications

Conference Committee Involvement (17)

Vertical-Cavity Surface-Emitting Lasers XXIX

29 January 2025 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XXVIII

31 January 2024 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XXVII

1 February 2023 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XXVI

26 January 2022 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XXV

6 March 2021 | Online Only, California, United States

Vertical-Cavity Surface-Emitting Lasers XXIV

5 February 2020 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XXIII

6 February 2019 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XXII

31 January 2018 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XXI

1 February 2017 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XX

17 February 2016 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XIX

11 February 2015 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XVIII

6 February 2014 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XVII

6 February 2013 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XVI

25 January 2012 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XV

26 January 2011 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XIV

27 January 2010 | San Francisco, California, United States

Vertical-Cavity Surface-Emitting Lasers XIII

28 January 2009 | San Jose, California, United States

Showing 5 of 17 Conference Committees

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