Dr. Markus R. Weiss
at Carl Zeiss SMT GmbH
SPIE Involvement:
Author
Publications (14)

Proceedings Article | 9 November 2015 Paper
Proceedings Volume 9635, 96351D (2015) https://doi.org/10.1117/12.2205054
KEYWORDS: Extreme ultraviolet, Photomasks, Prototyping, Extreme ultraviolet lithography, Electromagnetic coupling, Metrology, Calibration, Scanners, Image acquisition, Image processing

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 942219 (2015) https://doi.org/10.1117/12.2086265
KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Imaging systems, Line width roughness, Scanners, Prototyping, EUV optics, Metrology, Reflectivity

Proceedings Article | 29 October 2014 Paper
Proceedings Volume 9235, 92350N (2014) https://doi.org/10.1117/12.2068308
KEYWORDS: Extreme ultraviolet, Photomasks, Scanners, Extreme ultraviolet lithography, Inspection, Electromagnetic coupling, Scanning electron microscopy, Prototyping, Manufacturing, Logic

Proceedings Article | 24 April 2014 Paper
Proceedings Volume 9048, 90480X (2014) https://doi.org/10.1117/12.2046302
KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Critical dimension metrology, Reticles, Scanners, System integration, Metrology, Prototyping, Manufacturing

Proceedings Article | 1 October 2013 Paper
Proceedings Volume 8886, 88860I (2013) https://doi.org/10.1117/12.2031611
KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Scanners, Photomasks, Electromagnetic coupling, Metrology, Prototyping, Inspection, Manufacturing, Reticles

Proceedings Article | 8 November 2012 Paper
Anthony Garetto, Jan Hendrik Peters, Sascha Perlitz, Ulrich Matejka, Dirk Hellweg, Markus Weiss
Proceedings Volume 8522, 852220 (2012) https://doi.org/10.1117/12.981345
KEYWORDS: Extreme ultraviolet, Photomasks, Prototyping, Manufacturing, Climatology, Particles, Inspection, Scanners, Metrology, Extreme ultraviolet lithography

Proceedings Article | 23 March 2012 Paper
Proceedings Volume 8322, 83220L (2012) https://doi.org/10.1117/12.918691
KEYWORDS: Extreme ultraviolet, Photomasks, Extreme ultraviolet lithography, Scanners, Inspection, Manufacturing, Semiconducting wafers, Multilayers, Mirrors, Metrology

Proceedings Article | 14 October 2011 Paper
Proceedings Volume 8166, 816610 (2011) https://doi.org/10.1117/12.899038
KEYWORDS: Extreme ultraviolet, Photomasks, Manufacturing, Plasma, Extreme ultraviolet lithography, Airborne remote sensing, Light sources, Metrology, EUV optics, Electron beam lithography

Proceedings Article | 16 June 2003 Paper
Bas Mertens, Bas Wolschrijn, Rik Jansen, Norbert Koster, Markus Weiss, Marco Wedowski, Roman Klein, Thomas Bock, Reiner Thornagel
Proceedings Volume 5037, (2003) https://doi.org/10.1117/12.504542
KEYWORDS: Reflection, Carbon, Mirrors, Extreme ultraviolet, Contamination, Oxygen, Reflectivity, Reflectometry, Extreme ultraviolet lithography, Oxidation

Proceedings Article | 3 November 1997 Paper
Christian Jung, Johannes Bahrdt, Uwe Flechsig, Markus Weiss
Proceedings Volume 3150, (1997) https://doi.org/10.1117/12.283977
KEYWORDS: Mirrors, Microscopes, Monochromators, Dispersion, Spatial resolution, Ray tracing, Synchrotrons, Optical components, Microscopy, Synchrotron radiation

Proceedings Article | 11 November 1994 Paper
Markus Weiss, V. Wuestenhagen, E. Umbach
Proceedings Volume 2279, (1994) https://doi.org/10.1117/12.193127
KEYWORDS: Spatial resolution, Mirrors, Grazing incidence, Diffraction, X-rays, Scattering, Manufacturing, Ray tracing, Spatial frequencies, Optics manufacturing

SPIE Journal Paper | 1 April 1991
OE, Vol. 30, Issue 04, (April 1991) https://doi.org/10.1117/12.10.1117/12.167658
KEYWORDS: Crystals, Two wave mixing, Ferroelectric materials, Fourier transforms, Photorefraction, Laser crystals, Nonlinear crystals, Convolution, Image enhancement, Wave propagation

Proceedings Article | 1 March 1991 Paper
Proceedings Volume 1396, (1991) https://doi.org/10.1117/12.47755
KEYWORDS: Neural networks, Crystals, Neurons, Systems modeling, Content addressable memory, Binary data, Fourier transforms, Holograms, Ferroelectric materials, Prisms

Proceedings Article | 1 July 1990 Paper
Proceedings Volume 1319, (1990) https://doi.org/10.1117/12.22236

Showing 5 of 14 publications
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