Dr. Mark E. Rubin Profile

Dr. Mark E. Rubin

R&D Engineer at Synopsys Inc

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Publications (4)

Proceedings Article | 13 March 2009 Paper

Lithography aware statistical context characterization of 40nm logic cells

Mark Rubin, Naohiro Kobayashi, Toshiaki Yanagihara

Proceedings Volume 7275, 72751C (2009) https://doi.org/10.1117/12.814371

KEYWORDS: Lithography, Transistors, Statistical analysis, Device simulation, Logic, CMOS technology, Picosecond phenomena, Optical proximity correction, Electronics, Standards development

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Proceedings Article | 18 August 2000 Paper

Effect of stress and dopant redistribution on trench-isolated narrow devices

Gregory Scott, Faran Nouri, Mark Rubin, Martin Manley, Peter Stolk

Proceedings Volume 4181, (2000) https://doi.org/10.1117/12.395728

KEYWORDS: Copper, Etching, Semiconducting wafers, Aluminum, Wafer testing, Temperature metrology, Signal processing, Reliability, Resistance, Metals

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Proceedings Article | 1 September 1999 Paper

Stress minimization of corner rounding process during STI

Christopher Olsen, Faran Nouri, Mark Rubin, Olivier Laparra, Gregory Scott

Proceedings Volume 3881, (1999) https://doi.org/10.1117/12.360555

KEYWORDS: Oxides, Silicon, Chemical mechanical planarization, Diffusion, Capacitance, Etching, Thermal oxidation, Hydrogen, Annealing, Oxidation

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Proceedings Article | 1 September 1999 Paper

Systematic methodology for optimizing the tradeoff of polysilicon depletion versus boron penetration in sub-0.18-um surface-channel PMOS devices

Gregory Scott, Samar Saha, Christopher Olsen, Faran Nouri, Jeffrey Lutze, Mark Rubin, Martin Manley

Proceedings Volume 3881, (1999) https://doi.org/10.1117/12.360543

KEYWORDS: Boron, Oxides, Diffusion, Doping, Transistors, Control systems, Interfaces, Etching, Measurement devices, CMOS technology

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