Mr. Mark McNie Profile

Mark McNie

Principal MEMS Engineer

SPIE Involvement:

Author

Area of Expertise:

MEMS , Optics , Semiconductors

Publications (26)

Proceedings Article | 8 September 2011 Paper

Paper

Establishing a MOEMS process to realise microshutters for coded aperture imaging applications

Greg Hames, Nicola Price, Charlotte Bennett, Demaul Monk, Busbee Hardy, Stanley Rogers, Mark McNie, Rhodri Davies, Christopher Slinger, Ashley Johnson

Proceedings Volume 8165, 81651D (2011) https://doi.org/10.1117/12.895510

KEYWORDS: Microopto electromechanical systems, Coded aperture imaging, Imaging systems, Mirrors, Electrodes, Mid-IR, Manufacturing, Microelectromechanical systems, Oxides, Doping

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Proceedings Article | 8 September 2011 Open Access

Open Access

Paper

An adaptive coded aperture imager: building, testing and trialing a super-resolving terrestrial demonstrator

Charlotte Bennett, Kevin Gilholm, Gavin Dyer, Lee Russell, Kevin Ridley, Neil Gordon, Kevin Rice, Geoffrey de Villiers, Ian Proudler, Christopher Slinger, Mark McNie, Philip Watson, Richard Penney, David Huckridge

Proceedings Volume 8165, 816511 (2011) https://doi.org/10.1117/12.895435

KEYWORDS: Point spread functions, Imaging systems, Sensors, Staring arrays, Super resolution, Optical design, Image resolution, Coded aperture imaging, Calibration, Image processing

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Proceedings Article | 28 August 2010 Paper

Paper

A 2x2 multi-chip reconfigurable MOEMS mask: a stepping stone to large format microshutter arrays for coded aperture applications

Neil Gordon, Mark McNie, David King, Alan Brown, Gilbert Smith, Stephen Riches, Stanley Rogers

Proceedings Volume 7818, 78180G (2010) https://doi.org/10.1117/12.860436

KEYWORDS: Microopto electromechanical systems, Imaging systems, Mid-IR, Mirrors, Coded aperture imaging, Photomasks, Sensors, Modulation, Modulators, Coded apertures

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Proceedings Article | 28 August 2010 Paper

Paper

Tracking point targets at sub-pixel accuracy in adaptive coded aperture imagery without decoding

Kevin Ridley, Neil Gordon, Mark McNie, Helen Bennett, Kevin Gilholm, Christopher Slinger

Proceedings Volume 7818, 781808 (2010) https://doi.org/10.1117/12.861150

KEYWORDS: Detection and tracking algorithms, Coded apertures, Staring arrays, Point spread functions, Imaging systems, Sensors, Particles, Particle filters, Coded aperture imaging, Solids

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Proceedings Article | 28 August 2010 Paper

Paper

An experimental infrared sensor using adaptive coded apertures for enhanced resolution

Charlotte Bennett, Geoffrey de Villiers, Kevin Ridley, Mark McNie, Kevin Gilholm, Christopher Slinger, Neil Gordon, Ian Proudler, Lee Russell

Proceedings Volume 7818, 781806 (2010) https://doi.org/10.1117/12.860802

KEYWORDS: Point spread functions, Microopto electromechanical systems, Image resolution, Sensors, Imaging systems, Photomasks, Infrared imaging, Infrared cameras, Image enhancement, Infrared sensors

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Proceedings Article | 14 May 2010 Paper

Paper

LTCC-based differential photo acoustic cell for ppm gas sensing

M. McNie, M. Heikkinen, K. Keränen, B. Matveev, T. Kuusela, I. Kauppinen, K. Kautio, J. Ollila, J. Palve, P. Karioja, R. Jenkins

Proceedings Volume 7726, 77260H (2010) https://doi.org/10.1117/12.851854

KEYWORDS: Silicon, Sensors, Interferometers, Photoacoustic spectroscopy, Sapphire, Absorption, Gas sensors, Glasses, Reflectivity, Waveguides

Read Abstract +

Silicon MEMS cantilever-based photoacoustic technology allows for the sensing of ultra low gas concentrations with very wide dynamic range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement is probed with an optical interferometer providing a pico-meter resolution. In the gas sensor, the silicon cantilever microphone is placed in a two-chamber differential gas cell. By monitoring differential pressure changes between the two chambers, the differential cell operates as a differential infra-red detector for optical absorption signals through a measurement and reference path. The differential pressure signal is proportional to gas concentration in the optical measurement path. We have designed, implemented and tested a differential photo acoustic gas cell based on Low Temperature Co-fired Ceramic (LTCC) multilayer substrate technology. Standard LTCC technology enables implementation of 2.5D structures including holes, cavities and channels into the electronic substrate. The implemented differential photoacoustic gas cell structure includes two 10 mm long cylindrical cells, diameter of 2.4 mm. Reflectance measurements of the cell showed that reflectivity of the substrate material can be improved by a factor 15 - 90 in the 3 - 8 μm spectral region using gold or silver paste coatings. A transparent window is required in the differential gas cell structure in order to probe the displacement of the silicon cantilever. The transparent sapphire window was sealed to the LTCC substrate using two methods: screen printed Au80/Sn20 solder paste and pre-attached glass solder paste (Diemat DM2700P/H848). Both methods were shown to provide hermetic sealing of sapphire windows to LTCC substrate. The measured He-leak rate for the 10 sealed test samples implemented using glass paste were less than 2.0 ×10^-9 atm×cm³/s, which meets the requirement for the leak rate according to MIL-STD 883. The achieved hermetic level suggests that the proof-of-principle packaging demonstrator paves the way for implementing a novel differential photoacoustic gas cell for a future miniature gas sensor module. The future module consisting of a sample gas cell and immersion lens IR-LEDs together with interferometric probing of the cantilever microphone is expected to be capable of measuring ultra low concentrations of a wide range of gases with their fundamental absorption bands at 3 - 7 μm wavelength, such as CO, CO2 and CH₄.

Proceedings Article | 24 February 2010 Paper

Paper

Differential photo-acoustic gas cell based on LTCC for ppm gas sensing

P. Karioja, K. Kautio, I. Kauppinen, T. Kuusela, R. Jenkins, B. Matveev, M. McNie, J. Ollila, K. Keränen, M. Heikkinen

Proceedings Volume 7607, 760714 (2010) https://doi.org/10.1117/12.841363

KEYWORDS: Sensors, Silicon, Photoacoustic spectroscopy, Interferometers, Sapphire, Gas sensors, Light emitting diodes, Waveguides, Reflectivity, Absorption

Read Abstract +

Silicon MEMS cantilever-based photoacoustic technology allows for the sensing of ultra low gas concentrations with very wide dynamic range. The sensitivity enhancement is achieved with a cantilever microphone system in which the cantilever displacement is probed with an optical interferometer providing a pico-meter resolution. In the gas sensor, the silicon cantilever microphone is placed in a two-chamber differential gas cell. By monitoring differential pressure changes between the two chambers, the differential cell operates as a differential infra-red detector for optical absorption signals through a measurement and reference path. The differential pressure signal is proportional to gas concentration in the optical measurement path. We have designed, implemented and tested a differential photo-acoustic gas cell based on Low Temperature Co-fired Ceramic (LTCC) multilayer substrate technology. Standard LTCC technology enables implementation of 2.5D structures including holes, cavities and channels into the electronic substrate. The implemented differential photoacoustic gas cell structure includes two 10 mm long cylindrical cells, diameter of 2.4 mm. Reflectance measurements of the cell showed that reflectivity of the substrate material can be improved by a factor 15 - 90 in the 3 - 8 μm spectral region using gold or silver paste coatings. A transparent window is required in the differential gas cell structure in order to probe the displacement of the silicon cantilever. The transparent sapphire window was sealed to the LTCC substrate using two methods: screen printed Au80/Sn20 solder paste and pre-attached glass solder paste (Diemat DM2700P/H848). Both methods were shown to provide hermetic sealing of sapphire windows to LTCC substrate. The measured He-leak rate for the 10 sealed test samples implemented using glass paste were under 2.0 ×10^-9 atm×cm3/s, which meets the requirement for the leak rate according to MIL-STD 883. The achieved hermeticity level suggests that the proof-of-principle packaging demonstrator paves the way for implementing a novel differential photoacoustic gas cell for a future miniature gas sensor module. The future module consisting of a sample gas cell and immersion lens IR LEDs together with interferometric probing of the cantilever microphone is expected to be capable of measuring ultra low concentrations of a wide range of gases with their fundamental absorption bands at 3 - 7 μm wavelength, such as CO, CO₂ and CH₄.

Proceedings Article | 25 September 2009 Paper

Paper

Retro-reflective communications over a kilometre range using a MEMS-based optical tag

Keith Lewis, Andrew Scott, Gilbert Smith, David Jones, Kevin Ridley, Andrew Lewin, Kevin Brunson, Mark McNie

Proceedings Volume 7480, 74800L (2009) https://doi.org/10.1117/12.835073

KEYWORDS: Modulators, Modulation, Micromirrors, Sensors, Logic, Silicon, Telecommunications, Fabry–Perot interferometers, Microelectromechanical systems, Signal detection

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Proceedings Article | 25 August 2009 Paper

Paper

A scalable multi-chip architecture to realise large-format microshutter arrays for coded aperture applications

Alan Brown, Steven Stone, Christopher Slinger, Mark McNie, Stephen Riches, Stanley Rogers, Kevin Cannon, Gilbert Smith, Neil Gordon, David King

Proceedings Volume 7468, 74680E (2009) https://doi.org/10.1117/12.829105

KEYWORDS: Microopto electromechanical systems, Mirrors, Mid-IR, Imaging systems, Silicon, Fabry–Perot interferometers, Coded aperture imaging, Microelectromechanical systems, Coded apertures, Semiconducting wafers

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Proceedings Article | 19 February 2009 Paper

Paper

Large area transmissive modulator for a remotely interrogated MEMS-based optical tag

Andrew Scott, Keith Lewis, Gilbert Smith, Nicola Price, David Combes, Kevin Brunson, David Jones, Kevin Ridley, Mark McNie

Proceedings Volume 7208, 720806 (2009) https://doi.org/10.1117/12.809199

KEYWORDS: Modulators, Mirrors, Retroreflectors, Silicon, Modulation, Microopto electromechanical systems, Switching, Fabry–Perot interferometers, Surface micromachining, Microelectromechanical systems

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Proceedings Article | 2 October 2008 Paper

Paper

Hollow optical waveguide devices and systems

E. Finlayson, A. Davies, M. McNie, R. Jenkins, R. Davies, B. Perrett, J. Banerji

Proceedings Volume 7113, 71130E (2008) https://doi.org/10.1117/12.802454

KEYWORDS: Waveguides, Hollow waveguides, Wave propagation, Silicon, Photography, LIDAR, Multimode interference devices, Brain-machine interfaces, Sensors, Tolerancing

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Proceedings Article | 19 August 2008 Paper

Paper

A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems

Alan Brown, Keith Lewis, Gilbert Smith, David King, Mark McNie, Kevin Brunson, David Combes, Neil Gordon, Stanley Rogers, Steven Stone, Christopher Slinger, Nicola Price

Proceedings Volume 7096, 70960D (2008) https://doi.org/10.1117/12.794996

KEYWORDS: Microopto electromechanical systems, Mirrors, Imaging systems, Mid-IR, Coded aperture imaging, Electrodes, Fabry–Perot interferometers, Control systems, Silicon, Image resolution

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Proceedings Article | 19 August 2008 Paper

Paper

Adaptive coded aperture imaging in the infrared: towards a practical implementation

Mark McNie, Joe Meola, Neil Gordon, Kevin Gilholm, Malcolm Strens, Philip Watson, Mike Eismann, Mike Todd, Doug Payne, Geoff De Villiers, Chris Slinger, Kevin Ridley, Stanley Rogers, Gavin Dyer, Rebecca Wilson

Proceedings Volume 7096, 709609 (2008) https://doi.org/10.1117/12.805372

KEYWORDS: Imaging systems, Signal to noise ratio, Mid-IR, Coded aperture imaging, Sensors, Infrared imaging, Infrared radiation, Staring arrays, Detection and tracking algorithms, Point spread functions

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Proceedings Article | 16 October 2007 Paper

Paper

Coded aperture systems as non-conventional lensless imagers for the visible and infrared

Gregor McDonald, Rebecca Wilson, Chris Slinger, Keith Lewis, Malcolm Strens, Neil Gordon, Kevin Ridley, Mark McNie, Doug Payne, Geoff De Villiers

Proceedings Volume 6737, 67370D (2007) https://doi.org/10.1117/12.739043

KEYWORDS: Diffraction, Coded aperture imaging, Detector arrays, Sensors, Imaging systems, Infrared imaging, Photomasks, Infrared radiation, Image quality, Microopto electromechanical systems

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Proceedings Article | 26 September 2007 Paper

Paper

Reconfigurable mask for adaptive coded aperture imaging (ACAI) based on an addressable MOEMS microshutter array

Mark McNie, Keith Lewis, Stanley Rogers, Chris Slinger, Kevin Ridley, Gilbert Smith, Nicola Price, David Combes

Proceedings Volume 6714, 67140B (2007) https://doi.org/10.1117/12.735894

KEYWORDS: Mirrors, Microopto electromechanical systems, Coded aperture imaging, Mid-IR, Switching, Electrodes, Modulators, Imaging systems, Silicon, Fabry–Perot interferometers

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Proceedings Article | 26 September 2007 Paper

Paper

An investigation of the potential for the use of a high resolution adaptive coded aperture system in the mid-wave infrared

Gregor McDonald, Chris Slinger, Kevin Ridley, Geoff De Villiers, Keith Lewis, Michael Eismann, Mark McNie, Malcolm Strens, Rebecca Wilson, Neil Gordon, Doug Payne

Proceedings Volume 6714, 671408 (2007) https://doi.org/10.1117/12.736071

KEYWORDS: Sensors, Diffraction, Signal to noise ratio, Coded aperture imaging, Detector arrays, Photomasks, Imaging systems, Image quality, Target detection, Mid-IR

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Proceedings Article | 8 December 2004 Paper

Paper

Micromachined modulator arrays for use in free-space optical communication systems

Kevin Ridley, Gilbert Smith, Mark McNie, Keith Lewis, Andrew Scott

Proceedings Volume 5614, (2004) https://doi.org/10.1117/12.578552

KEYWORDS: Modulators, Silicon, Modulation, Microopto electromechanical systems, Mirrors, Free space optical communications, Telecommunications, Fabry–Perot interferometers, Free space optics, Quantum wells

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Proceedings Article | 6 December 2004 Paper

Paper

Multimode interference (MMI) devices in silicon hollow waveguide technology for military electro-optic systems

Andrew Blockley, Richard Jenkins, Eric Gorton, Mark McNie, Jessica Maclean

Proceedings Volume 5612, (2004) https://doi.org/10.1117/12.578252

KEYWORDS: Waveguides, Multimode interference devices, Hollow waveguides, Brain-machine interfaces, Silicon, Spectroscopy, Tolerancing, Sensors, Copper, Signal attenuation

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Proceedings Article | 30 November 2004 Paper

Paper

Integrated micromachined filters for wavelength division multiplexing

Keith Lewis, Gilbert Smith, Mark McNie

Proceedings Volume 5618, (2004) https://doi.org/10.1117/12.578554

KEYWORDS: Silicon, Etching, Photomasks, Optical filters, Wavelength division multiplexing, Mirrors, Electronic filtering, Tunable filters, Refractive index, Reflectivity

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Proceedings Article | 16 August 2004 Paper

Paper

Designing manufacturable MEMS in CMOS-compatible processes: methodology and case studies

Mark da Silva, Rhodri Davies, Mark McNie, Alexandra Rickard, Gerold Schropfer, Francois-Xavier Musalem

Proceedings Volume 5455, (2004) https://doi.org/10.1117/12.544971

KEYWORDS: Computer aided design, Microelectromechanical systems, Manufacturing, Design for manufacturing, Resonators, Design for manufacturability, Monte Carlo methods, Materials processing, Tolerancing, Semiconducting wafers

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Proceedings Article | 15 January 2003 Paper

Paper

Performance enhancement and evaluation of deep dry etching on a production cluster platform

Paulo Schina, Anton Kemmeren, Huma Ashraf, Mark McNie, Glenn Nicholls, Colin Gormley, Fred Roozeboom, Eric Van Den Heuvel, Serrita McAuley, Alexandra Rickard, Richard Barnett, Corrado Di Luciano, Christopher Pickering, Jyrki Kiihamaki, Iain Young, Jan Verhoeven, Janet Hopkins

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478242

KEYWORDS: Etching, Semiconducting wafers, Dry etching, Silicon, Microsystems, Plasma, Microelectromechanical systems, Dielectrics, Oxides, Capacitors

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Proceedings Article | 28 September 2001 Paper

Paper

Engineering in- and out-of-plane stress in PECVD silicon nitride for CMOS-compatible surface micromachining

Kevin Brunson, Mark McNie, Rhodri Davies, David Combes

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442962

KEYWORDS: Plasma enhanced chemical vapor deposition, Semiconducting wafers, Silicon, Lithium, Surface micromachining, Composites, Chemical analysis, Micromachining, Digital Light Processing, Remote sensing

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Proceedings Article | 30 April 2001 Paper

Paper

Characterization and optimization of deep dry etching for MEMS applications

Alexandra Rickard, Mark McNie

Proceedings Volume 4407, (2001) https://doi.org/10.1117/12.425287

KEYWORDS: Etching, Semiconducting wafers, Silicon, Anisotropy, Microelectromechanical systems, Dry etching, Oxides, Ions, Photomasks, High aspect ratio silicon micromachining

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Proceedings Article | 5 April 2001 Paper

Paper

Development of a workstation for optical testing and modification of IMEMS on a wafer

Alun Harris, Mark McNie, James Burdess, John Hedley

Proceedings Volume 4408, (2001) https://doi.org/10.1117/12.425356

KEYWORDS: Semiconducting wafers, Laser ablation, Gyroscopes, Profilometers, Electrodes, Optical testing, Wafer-level optics, Vibrometry, Objectives, Measurement devices

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Proceedings Article | 8 September 1998 Paper

Paper

Polysilicon for everything?

David King, Robert Bunyan, Roger Carline, Rebecca Wilson, Mark McNie, J. Gillham, M. Ward

Proceedings Volume 3514, (1998) https://doi.org/10.1117/12.323901

KEYWORDS: Sensors, Silicon, Microelectromechanical systems, Natural surfaces, Data analysis, Microelectronics, CMOS technology, Defense and security, Photomicroscopy, Raman spectroscopy

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Proceedings Article | 31 August 1998 Paper

Paper

CMOS compatibiltity of high-aspect-ratio micromachining (HARM) in bonded silicon-on-insulator (BSOI)

David King, Mark McNie

Proceedings Volume 3511, (1998) https://doi.org/10.1117/12.324311

KEYWORDS: Semiconducting wafers, Silicon, Micromachining, Dielectrics, Etching, Transistors, Capacitors, Dry etching, Information operations, Defense and security

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Showing 5 of 26 publications

Conference Committee Involvement (3)

Adaptive Coded Aperture Imaging and Non-Imaging Sensors V

25 August 2011 | San Diego, California, United States

Adaptive Coded Aperture Imaging and Non-Imaging Sensors IV

2 August 2010 | San Diego, California, United States

Adaptive Coded Aperture Imaging and Non-Imaging Sensors III

2 August 2009 | San Diego, California, United States

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