The change of resistivity of the epoxy-based nanocomposite was studied in dependence on concentration of dispersed
nanoparticles. The SU8 negative-tone photoresist was applied for the polymer matrix and the conductive carbon black
powder for the fillings. The largest decrease of resistivity was obtained at 2-3 wt% of fillings whereas at loadings higher
that 8 wt% it does not decreases further appreciably. The resistivity of the prepared nanocomposites becomes smaller
after the UV-exposure. The applied nanofillings change the viscosity of the material but the spin-coating application still
remains reliable and was approved to work well for concentrations of at least up to 3 wt%. The addition of nanofillings
up to 2 wt% does not destroy the resolution of photolithography as seen on the standard test pattern with line widths from
2 to 10 μm.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.