Mr. Marco Del Sarto Profile

Marco Del Sarto

at ST Microelectronics

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Publications (2)

Proceedings Article | 30 December 2003 Paper

Novel process for realization of multiple-axis actuators suitable for the realization of an optical switch

Marco Del Sarto, Simone Sassolini, Mauro Marchi, Lorenzo Baldo

Proceedings Volume 5342, (2003) https://doi.org/10.1117/12.524722

KEYWORDS: Actuators, Semiconducting wafers, Microelectromechanical systems, Wafer bonding, Mirrors, Electrodes, Silicon, Etching, Optical switching, Metals

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Proceedings Article | 15 January 2003 Paper

Batch-fabricated silicon electrostatic micropositioner for dual-stage actuation

Marco Del Sarto, Simone Sassolini, Lorenzo Baldo, Mauro Marchi, Martin McCaslin

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478240

KEYWORDS: Actuators, Microelectromechanical systems, Microactuators, Semiconducting wafers, Finite element methods, Silicon, Magnetism, Head, Electrodes, Metals

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