Dr. Marc Schneider Profile

Dr. Marc Schneider

at Carl Zeiss SMT GmbH

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Publications (2)

Proceedings Article | 10 April 2024 Presentation

Aims EUV 3.0 –Zeiss’ next generation EUV mask review tool

Sven Krannich, Renzo Capelli, Matthias Stecher, Marc Schneider, Stefan-Markus Mueller

Proceedings Volume PC12953, PC129530F (2024) https://doi.org/10.1117/12.3010758

KEYWORDS: Extreme ultraviolet, Source mask optimization, Scanners, Light sources and illumination, Imaging systems, Extreme ultraviolet lithography, Printing, Industry, Industrial applications

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Proceedings Article | 30 April 2023 Presentation

AIMS® EUV 3.0: ZEISS’ next generation EUV mask review tool

Sven Krannich, Renzo Capelli, Matthias Stecher, Marc Schneider, Stefan Mueller

Proceedings Volume PC12494, PC1249407 (2023) https://doi.org/10.1117/12.2658396

KEYWORDS: Extreme ultraviolet, Extreme ultraviolet lithography, Scanners, Metrology, Imaging systems, Source mask optimization, Printing, Illumination engineering

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