Dr. Manu Perumkunnil
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 26 May 2022 Presentation + Paper
M. Gupta, M. Perumkunnil, F. Yasin, G. Mirabelli, K. Garello, A. Gupta, A. Furnémont, G. Kar
Proceedings Volume 12052, 1205202 (2022) https://doi.org/10.1117/12.2613482
KEYWORDS: Metals, Transistors, Resistance, Front end of line, Switching, Optical lithography, Magnetism, Copper, Back end of line, Logic

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