Mr. Longjiang Chen Profile

Longjiang Chen

at Zhejiang Univ

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Publications (2)

Proceedings Article | 12 November 2010 Paper

Distance measurement for curved surface based on confocal technique

Jianbo Luo, Yiyong Liang, Wuji Ding, Guoguang Yang

Proceedings Volume 7855, 78551L (2010) https://doi.org/10.1117/12.869825

KEYWORDS: Confocal microscopy, Objectives, Distance measurement, Sensors, Ferroelectric materials, Beam splitters, Inspection, Profiling, Light sources, Collimation

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Proceedings Article | 20 November 2009 Paper

Research on full-field measurement of optical film thickness by processing double interferometric fringes based on digital wavefront interferometry

Long-jiang Chen, Yi-yong Liang, Jian-bo Luo, Chun-hui Zhang, Guo-guang Yang

Proceedings Volume 7511, 751126 (2009) https://doi.org/10.1117/12.839934

KEYWORDS: Interferometry, Wavefronts, Photoresist materials, Interfaces, Optical testing, Interferometers, Lithography, Reflectivity, CCD image sensors, Refractive index

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