Mr. Lixiang Wu Profile

Lixiang Wu

at Univ of Science and Technology of China

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Author

Publications (3)

Proceedings Article | 28 October 2016 Paper

Method for ion beam etching in angles with multi-layers model

Siwei Zeng, Lixiang Wu, Keqiang Qiu, Zhengkun Liu, Yilin Hong, Shaojun Fu

Proceedings Volume 9683, 96830L (2016) https://doi.org/10.1117/12.2242280

KEYWORDS: Etching, Ion beams, Photoresist materials, Diffraction gratings, Monte Carlo methods, Sputter deposition, Lithium, Quartz, Ions, Chemical species

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Proceedings Article | 13 March 2015 Paper

Finely control groove-depth variations of large-area diffraction gratings

Lixiang Wu, Keqiang Qiu, Xiaolong Jiang, Yanchang Zheng, Xiangdong Xu, Yilin Hong, Shaojun Fu

Proceedings Volume 9374, 937411 (2015) https://doi.org/10.1117/12.2077396

KEYWORDS: Etching, Ion beams, Raster graphics, Ions, Diffraction gratings, Optical components, Algorithm development, Vacuum ultraviolet, Synchrotron radiation, Synchrotron technology

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Proceedings Article | 28 August 2014 Paper

Fabrication of high aspect ratio silicon gratings by interference lithography and potassium hydroxide anisotropic etch technique

Yanchang Zheng, Keqiang Qiu, Xiaolong Jiang, Qingbo Wang, Lixiang Wu, Lali Bi, Yilin Hong

Proceedings Volume 9170, 917018 (2014) https://doi.org/10.1117/12.2058669

KEYWORDS: Etching, Silicon, Anisotropic etching, Lithography, Fabrication, Semiconducting wafers, Potassium, Photoresist materials, Aluminum, Optical alignment

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