Lei Zhang
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 27 March 2013 Paper
Proceedings Volume 8625, 86252C (2013) https://doi.org/10.1117/12.2005194
KEYWORDS: Indium gallium nitride, Quantum dots, Satellites, Nitrogen, Diffusion, Temperature metrology, Dry etching, Chromium, Semiconductors, Single photon

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