Mr. Kyle J. Walsh Profile

Kyle J. Walsh

at US Naval Research Lab

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

SPIE Journal Paper | 2 November 2023

Enhanced thermo-optic effects in silicon nitride photonic integrated circuits via polymer claddings

Marcel W. Pruessner, Nathan F. Tyndall, Kyle J. Walsh, Todd H. Stievater

JNP, Vol. 17, Issue 04, 046001, (November 2023) https://doi.org/10.1117/12.10.1117/1.JNP.17.046001

KEYWORDS: Silicon nitride, Waveguides, Cladding, Polymers, Microrings, Thermal optics, Photonic integrated circuits, Polymer multimode waveguides, Silicon, Silica

Read Abstract +

Silicon nitride (SiN) has been receiving increased attention for photonic integrated circuits (PICs) due to its ultra-low optical losses, phase stability, and broadband transparency. However, SiN waveguides have a low thermo-optic coefficient and exhibit weak electro-optic effects. For this reason, most foundry-processed SiN PICs remain passive or exhibit inefficient tuning. In this work, we investigate polymer claddings to enhance the thermo-optic phase shifting in foundry-processed low-loss, thin core SiN PICs. We first develop a thermal testing setup and measure the response of standard foundry SiN / SiO2 waveguides. By taking advantage of the differing TE and TM modal overlap with the SiN core and SiO2 cladding, we extract the LPCVD-SiN thermo-optic coefficient as dnSiN / dT = 2.57 × 10 − 5 / ° C at λ = 1550 nm and dnSiN / dT = 2.82 × 10 − 5 / ° C at λ = 780 nm. We next consider SiN waveguides in which the top SiO2 cladding is replaced with a spin-coated thermo-optic polymer. The thin waveguide core (tSiN = 150 to 220 nm) enables a weakly confined mode with a large overlap with the top polymer cladding. Measurements at λ = 780 nm wavelength show up to a 12-fold improvement in the thermo-optic phase shift of these polymer-cladded SiN waveguides compared with SiO2 cladded devices while inducing negligible excess loss. Finally, we show broadband Mach–Zehnder interferometer measurements demonstrating thermo-optic tuning at visible wavelengths. The simple spin-coat post-processing of foundry SiN PICs in this work offers a potential path toward efficient optical phase shifting in low-loss SiN waveguides over a broad wavelength range

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years