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Kyeong-Mee Yeon
Senior Engineer at Toppan Photomasks Korea Ltd
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Publications (2)
Proceedings Article | 19 July 2000 Paper
Improvement of defect density for DUV halftone PSM
Kyu-Yong Lee, Lee-Ju Kim, Kyeong-Mee Yeon, Sang Lee, Hong-Seok Kim
Proceedings Volume 4066, (2000) https://doi.org/10.1117/12.392039
KEYWORDS: Etching, Chemistry, Photomasks, Phase shifts, Inspection, Chromium, Plasma systems, Dry etching, Plasma etching, Deep ultraviolet
Proceedings Article | 25 August 1999 Paper
Implementation of chemically amplified resist on mask technology below 0.6-um feature using high-acceleration voltage e-beam system
Il-Ho Lee, Kyung-Han Nam, Kyeong-Mee Yeon, Keuntaek Park, Sang-Sool Koo, Youngmo Koo, Ki-Ho Baik
Proceedings Volume 3748, (1999) https://doi.org/10.1117/12.360240
KEYWORDS: Photomasks, Scanning electron microscopy, Chemically amplified resists, Dry etching, Optical proximity correction, Photomicroscopy, Photoresist processing, Etching, Coating, Semiconducting wafers
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