Ms. Kumiko Akashika Profile

Kumiko Akashika

at Dainippon Screen Manufacturing Co Ltd

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 27 March 2008 Paper

Stress measurement system for process control

Kumiko Akashika, Masahiro Horie

Proceedings Volume 6922, 692231 (2008) https://doi.org/10.1117/12.772399

KEYWORDS: Semiconducting wafers, Process control, Semiconductors, Control systems, Silicon, Time metrology, Distance measurement, Objectives, Silicon films, Cameras

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Proceedings Article | 26 March 2008 Paper

Spectroscopic ellipsometer for ultra thin film

Kumiko Akashika, Shuji Shiota, Shinji Yamaguchi, Masahiro Horie, Masayoshi Kobayashi

Proceedings Volume 6922, 69223M (2008) https://doi.org/10.1117/12.772414

KEYWORDS: Thin films, Spectroscopy, Semiconductors, Spectroscopes, Ultraviolet radiation, Light sources, Light, Polarizers, Dielectric polarization, Process control

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Proceedings Article | 25 March 2008 Paper

Film thickness measurement tool with a stress measurement function

Masahiro Horie, Kumiko Akashika, Shuji Shiota, Shinji Yamaguchi, Kakumichi Yamano

Proceedings Volume 6922, 692235 (2008) https://doi.org/10.1117/12.772416

KEYWORDS: Semiconducting wafers, Spectroscopy, Mirrors, Aspheric optics, Spectroscopic ellipsometry, Time metrology, Refractive index, Light sources, Semiconductors, Reflectance spectroscopy

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Proceedings Article | 2 June 2003 Paper

Measurement of the dielectric function spectra of low dielectric constant using spectroscopic ellipsometry

Masahiro Horie, Kamil Postava, Tomuo Yamaguchi, Kumiko Akashika, Hideki Hayashi, Fujikazu Kitamura

Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.482678

KEYWORDS: Dielectrics, Electronics, Spectroscopy, Infrared radiation, Polymers, Absorption, Spectroscopic ellipsometry, Reflectance spectroscopy, Infrared spectroscopy, Visible radiation

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