Mr. Koichi Kurosawa Profile

Koichi Kurosawa

at Hitachi High-Tech Corp

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Publications (1)

Proceedings Article | 13 March 2018 Paper

Influence of e-beam aperture angle on CD-SEM measurements for high-aspect ratio structure

Daisuke Bizen, Makoto Sakakibara, Makoto Suzuki, Uki Ikeda, Shunsuke Mizutani, Kouichi Kurosawa, Hajime Kawano

Proceedings Volume 10585, 105851A (2018) https://doi.org/10.1117/12.2296756

KEYWORDS: Monte Carlo methods, Scanning electron microscopy, Cadmium, Silicon, Critical dimension metrology, Spatial resolution, Optical simulations, 3D metrology, Semiconductors, Laser scattering

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