Komal Thakur
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 24 May 2022 Presentation + Paper
Proceedings Volume 12137, 121370E (2022) https://doi.org/10.1117/12.2621895
KEYWORDS: Reflectometry, Spectroscopy, Scanning electron microscopy, Laser metrology, Image processing, Optical metrology, Etching, Critical dimension metrology, Objectives, Laser sources

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top