Mr. Kenichiro Natsuda Profile

Kenichiro Natsuda

at Osaka Univ

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Publications (2)

Proceedings Article | 30 March 2010 Paper

Dynamics of radical cation of poly(4-hydroxystyrene) generated in thin film upon exposure to electron beam

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto, Akinori Saeki, Seiichi Tagawa

Proceedings Volume 7639, 76391K (2010) https://doi.org/10.1117/12.846699

KEYWORDS: Absorption, Solids, Electron beams, Polymers, Extreme ultraviolet lithography, FT-IR spectroscopy, Absorbance, Chromium, Chemically amplified resists, Extreme ultraviolet

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Proceedings Article | 26 March 2008 Paper

Acid-base equilibrium in chemically amplified resist

Kenichiro Natsuda, Takahiro Kozawa, Kazumasa Okamoto, Seiichi Tagawa

Proceedings Volume 6923, 69231A (2008) https://doi.org/10.1117/12.772165

KEYWORDS: Chemically amplified resists, Absorption, Polymers, Line edge roughness, Solids, Diffusion, Image quality, Extreme ultraviolet, Photoresist processing, Polymer thin films

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