Dr. Kenichi Okuyama Profile

Dr. Kenichi Okuyama

at Dai Nippon Printing Co Ltd

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Publications (1)

Proceedings Article | 1 April 2009 Paper

Molecular resists based on calix[4]resorcinarene derivatives for EB lithography

Kenichi Okuyama

Proceedings Volume 7273, 72732U (2009) https://doi.org/10.1117/12.813632

KEYWORDS: Lithography, Line edge roughness, Extreme ultraviolet lithography, Semiconducting wafers, Scanning electron microscopy, Standards development, Molecules, Polymers, Silicon, Electron beams

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