Dr. Ken Murayama Profile

Dr. Ken Murayama

at Hitachi Kenki FineTech Co Ltd

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Author

Publications (3)

Proceedings Article | 24 March 2009 Paper

Three-dimensional profile extraction from CD-SEM top-view image

Atsuko Yamaguchi, Yoshinori Momonoi, Ken Murayama, Hiroki Kawada, Junichi Tanaka

Proceedings Volume 7272, 72722G (2009) https://doi.org/10.1117/12.816208

KEYWORDS: Line edge roughness, 3D metrology, Atomic force microscopy, 3D image processing, Scanning electron microscopy, Edge detection, Electron microscopes, Atomic force microscope, Feature extraction, Electron beams

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Proceedings Article | 24 March 2006 Paper

Three-dimensional metrology with side-wall measurement using tilt-scanning operation in digital probing AFM

Ken Murayama, Satoshi Gonda, Hajime Koyanagi, Tsuneo Terasawa

Proceedings Volume 6152, 615216 (2006) https://doi.org/10.1117/12.654346

KEYWORDS: 3D metrology, Atomic force microscopy, 3D image processing, Semiconducting wafers, Semiconductors, Metrology, Silicon, Scanning electron microscopy, Carbon nanotubes, Critical dimension metrology

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Proceedings Article | 10 May 2005 Paper

AFM measurement of linewidth with sub-nanometer scale precision

Satoshi Gonda, Kazuto Kinoshita, Hironori Noguchi, Tomizo Kurosawa, Hajime Koyanagi, Ken Murayama, Tsuneo Terasawa

Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.599442

KEYWORDS: Atomic force microscopy, Interferometers, 3D scanning, Scanners, Digital signal processing, Servomechanisms, Metrology, Mirrors, Signal processing, Precision measurement

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