Dr. Ken C. Cheng Profile

Dr. Ken C. Cheng

President at Simax Technologies Inc

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 6 December 2004 Paper

Ken Cheng, Yuhuan Xu, Peter Sheu

Proceedings Volume 5567, (2004) https://doi.org/10.1117/12.583111

KEYWORDS: Silica, Glasses, Vacuum ultraviolet, Sol-gels, Chlorine, Fluorine, Photomasks, Dielectrics, Transmittance, Absorption

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Keywords/Phrases