Dr. Kazuya Matsumoto Profile

Dr. Kazuya Matsumoto

Student at Tokyo Institute of Technology

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Publications (3)

Proceedings Article | 26 March 2008 Paper

New high-index fluids: exploiting anomalous dispersion for immersion lithography

Elizabeth Costner, Kazuya Matsumoto, Brian Long, J. Christopher Taylor, William Wojtczak, C. Grant Willson

Proceedings Volume 6923, 69230B (2008) https://doi.org/10.1117/12.772979

KEYWORDS: Absorbance, Water, Optical properties, Immersion lithography, Refraction, Absorption, Carbon, Sodium, Refractive index, Electrons

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Proceedings Article | 26 March 2008 Paper

High-index resist for 193-nm immersion lithography

Kazuya Matsumoto, Elizabeth Costner, Isao Nishimura, Mitsuru Ueda, C. Grant Willson

Proceedings Volume 6923, 692305 (2008) https://doi.org/10.1117/12.772958

KEYWORDS: Refractive index, Absorbance, Polymers, Absorption, Chlorine, Immersion lithography, Sulfur, Chemistry, Water, Imaging spectroscopy

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Proceedings Article | 26 March 2008 Paper

Non-chemically amplified resists for 193 nm lithography

Isao Nishimura, William Heath, Kazuya Matsumoto, Wei-Lun Jen, Saul Lee, Colin Neikirk, Tsutomu Shimokawa, Koji Ito, Koichi Fujiwara, C. Grant Willson

Proceedings Volume 6923, 69231C (2008) https://doi.org/10.1117/12.772646

KEYWORDS: Polymers, Diffusion, Line width roughness, Lithography, Optical lithography, Ultraviolet radiation, Semiconducting wafers, Chemically amplified resists, Polymer thin films, Polymethylmethacrylate

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