Multi-barrier nano-thin films device is a new device based on the quantum tunneling effect. This kind of device has
piezoresistive effect and the piezoresistive sensitivity is about one order than that of silicon piezoresistive device. Thin
film device fabricated by using molecular beam epitaxy (MBE) has the advantages of small temperature drift compared
with the doped devices. Comparing with the electrostatic comb-drive mode, the electromagnetic driving approach is not
only with simple structure and easy to fabrication, but also can achieve large displacement-driven. These two methods
applied to the study of gyroscope can improve the sensitivity in essence. In this paper, a novel gyroscope structure with
folding-type orthogonal beams is designed which is not only meet the drive approach, but also meet the detection
conditions. The nano thin films device and gyroscope structure are fabricated by the GaAs surface micromachining and
GaAs bulk micromachining processes respectively. The preliminary measurement results prove that the gyroscope
design is feasible.
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