Lithographical patterning on the surface of a thin pipe is required for fabricating three-dimensional micro-parts. For
this reason, a new exposure system for printing patterns on a cylindrical pipe by synchronous scan-projection exposure
was developed. Using the exposure system, resist patterns with a width of 100 μm were printed on a surface of
stainless-steel pipe with a diameter of 2 mm. The exposure time was 30 s. Printed resist pattern widths were measured in
the axial and circumferential directions. As a result, pattern widths were almost uniform in both axial and circumferential
directions. Judging from the experimental results, it was clarified that the patterning technology had a potential to be
applied to fabrications of bio-medical devices and micro-parts.
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