Prof. Jun Liu Profile

Prof. Jun Liu

at Hubei Jiufengshan Lab.

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Publications (1)

Proceedings Article | 9 April 2024 Poster + Paper

The resolution enhancement lithography assisted by chemical shrink based on KrF lithography technology

Shi-Li Xiang, Jun Liu, Lin-Po Hao, Chuan-Yu Shao

Proceedings Volume 12956, 129560P (2024) https://doi.org/10.1117/12.3010606

KEYWORDS: Lithography, Line edge roughness, Resolution enhancement technologies, Critical dimension metrology, Semiconducting wafers, Semiconductors, Edge roughness, Manufacturing, Chemical reactions, Semiconductor manufacturing

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